Realization method of tunable superlattice oscillator
An implementation method and superlattice technology, which are applied in semiconductor devices, electrical components, circuits, etc., can solve the problem of no superlattice oscillator, etc., and achieve the effect of continuous change
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[0013] In the following, the substantive features and significant progress of the present invention will be further described through the preparation process of the superlattice oscillator and with reference to the accompanying drawings.
[0014] 1. Device preparation: use molecular beam epitaxy equipment to grow high-quality GaAs / AlAs superlattice materials. The superlattice has 40 periods, the barrier width is d=4nm, and the well width is w=9nm. Quantum wells are n-type doped with Si, with a concentration of 1×10 17 cm -3 . Both ends of the superlattice are heavily doped with Si impurities n + -Al 0.5 Ga 0.5 As double-teams to form a sandwich structure. Good interface quality must be ensured during device fabrication.
[0015] 2. Bond the grown sample to an area of 0.01mm 2 On the substrate, the quality of the ohmic contact is guaranteed. Make signal pinouts.
[0016] 3. Measure the I-V characteristics of the device in the presence of a magnetic field. Use a hig...
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