The invention discloses a terahertz
hybrid integrated
resonant tunneling diode detector packaged by a
metal waveguide, and belongs to the technical field of terahertz
wireless transceiving, the terahertz
hybrid integrated
resonant tunneling diode detector comprises an RTD tube core, a substrate circuit and a
metal waveguide packaging structure, the substrate circuit comprises a substrate, an A-surface circuit and a B-surface
metal ground, and the A-surface circuit and the B-surface metal ground are located above and below the substrate; the A-surface circuit comprises a
resonance circuit, a
microstrip E-surface probe of a
microstrip-
waveguide conversion structure, a bias filtering structure and a bias pad which are connected in sequence; the
resonance circuit comprises a double-opening
resonance ring, an MIM
capacitor and a shunt
resistor, the MIM
capacitor and the shunt
resistor are located at the opening position of the double-opening resonance ring, parallel split branches are arranged in the double-opening resonance ring in the
signal transmission direction, and the RTD tube core is located at the split position of the parallel split branches. According to the invention, detection and oscillation can be realized at the same time, the device can be cascaded with a mixer packaged by a metal waveguide, the device has the
advantage of expandability, and compared with monolithic integration, the device has the advantages of low cost, high design flexibility, fast iteration and the like on the premise of ensuring the detection effect.