A diluted magnetic semiconductor thin film material appears many novel physical properties, and the novel physical properties provide a broader space for development of novel spin-based devices, so that the diluted magnetic semiconductor thin film material has broad application prospects in the fields of magnetic inductors, high-density non-volatile memories, optical isolators, semiconductor laser devices, spin quantum computers and the like, and has become one of research hot spots in the field of the materials. Traditional methods for preparing thin film materials comprise a molecular beam epitaxy method, a metal organic matter chemical vapor deposition method and the like, and the methods are balanced growth methods and have the shortcomings of low doping efficiency, high equipment maintenance cost, expensive price of raw materials, long production period, complex tail gas treatment process and the like. The invention belongs to the technical field of semiconductors and provides a method for preparing a GaMnN diluted magnetic semiconductor thin film material, and the method has the advantages of high doping efficiency, low preparation cost, short production period, simple tail gas treatment and the like, and can greatly improve the production efficiency and economic benefits.