Transistor based on bibarrier tunnel junction resonance tunneling effect
A resonant tunneling and tunnel junction technology, applied in transistors, diodes, semiconductor devices, etc., can solve problems such as large leakage current, lack of control, and difficulty in fabricating double-barrier tunnel junctions
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2006-03-29
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention relates to a solid-state switch and amplifying device, that is, a transistor, especially a spin transistor device based on double potential barrier tunnel junction resonant tunneling effect. Background technique
[0002] Since the discovery of the giant magnetoresistance effect (GMR) in magnetic multilayer films in 1988, great progress has been made in the research and application of physics and material science. In 1993, Johnson [M. Johnson, Science 260 (1993) 320] proposed a ferromagnetic metal emitter, a non-magnetic metal base with a thickness smaller than the spin diffusion length, and another ferromagnetic metal collector: " Ferromagnetic metal / nonmagnetic metal / ferromagnetic metal" sandwich all-metal spin transistor. figure 1 is a schematic diagram of this all-metal spin transistor. The speed of this all-metal transistor can be compared with that of semiconductor Si devices, but the energy consumption is 10-20 times lower, the de...
Examples
Embodiment 1
[0053] refer to Figure 3a and prepare a spin transistor with double potential barrier tunnel junction resonant tunneling effect of the present invention. The spin transistor with double potential barrier tunnel junction resonant tunneling effect is made of a Si material with a thickness of 0.4 mm as the substrate 1, and a layer of SiO is formed on the Si substrate 1. 2 An insulating layer 2 with a thickness of 10 nm is formed, and an emitter 3 is formed on the insulating layer 2. The emitter 3 is composed of an antiferromagnetic layer Ir-Mn with a thickness of 12 nm and Fe of 8 nm. The antiferromagnetic layer Ir-Mn is used for In the direction of the magnetization of the fixed emitter 3; using Al 2 o 3 The first tunnel barrier layer 4 made of materials is formed on the emitter 3; the thickness of the first tunnel barrier layer 4 is 1 nm. And a base 5 with a thickness of 8 nm is formed on the first tunnel barrier layer 4, and the base 5 is made of non-magnetic metal Cu. an...
Embodiment 2
[0056] refer to Figure 3a and prepare a spin transistor with double potential barrier tunnel junction resonant tunneling effect of the present invention. The spin transistor with double potential barrier tunnel junction resonant tunneling effect is made of a Si material with a thickness of 0.6 mm as the substrate 1, and a layer of SiO is formed on the Si substrate 1. 2 An insulating layer 2 with a thickness of 100 nm is formed, and an emitter 3 is formed on the insulating layer 2. The emitter 3 is composed of an antiferromagnetic layer Fe-Mn with a thickness of 15 nm and a La with a thickness of 4 nm. 0.7 Sr 0.3 MnO 3 The direction of the magnetization of the emitter 3 is fixed; SrTiO 3 The first tunnel barrier layer 4 made of material is formed on the emitter 3, and the thickness of the first tunnel barrier layer 4 is 1.0 nm; and a base electrode with a thickness of 4 nm is formed on the first tunnel barrier layer 4 5. The base 5 is composed of a non-magnetic metal mater...
Embodiment 3
[0060] refer to Figure 3a and prepare a spin transistor with double potential barrier tunnel junction resonant tunneling effect of the present invention.
[0061] The spin transistor with double potential barrier tunnel junction resonant tunneling effect is made of a Si material with a thickness of 0.6 mm as the substrate 1, and a layer of SiO is formed on the Si substrate 1. 2 An insulating layer 2 with a thickness of 300 nm is formed, and an emitter 3 is formed on the insulating layer 2, and the emitter 3 is composed of a GaMnAs magnetic semiconductor material layer with a thickness of 4 nm. The direction of the magnetization of the emitter 3 is relatively free and can change with the external magnetic field; the first tunnel barrier layer 4 made of MgO material is formed on the emitter 3; the first tunnel barrier layer 4 The thickness is 1.0 nm. And on the first tunnel barrier layer 4, a base electrode 5 with a thickness of 5nm is formed, and the base electrode 5 is made...