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Large area photon sieve

A photon sieve and large-area technology, applied in the field of photon sieves, can solve problems such as difficulty in increasing the diameter of photon sieves

Inactive Publication Date: 2010-07-21
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a photon sieve with a new structure, which adopts a partition design method to increase the diameter of the minimum aperture of the photon sieve and break through the limit of the minimum aperture in the manufacturing process, thereby solving the problem that it is difficult to increase the diameter of the photon sieve in the prior art. Realize the preparation of large-area photonic sieves

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Embodiment 1: A photon sieve with a new structure, diameter Φ=100mm, focal length f=500mm, working wavelength λ=632.8nm.

[0039] If the design method of the traditional photon sieve is adopted, the photon sieve required by this embodiment will have a period of 3940 rings, and the minimum aperture diameter will be 0.00318mm, such as image 3 shown. These parameters clearly pose a great challenge to current manufacturing processes.

[0040] This example figure 2 As shown, the photon sieve is divided into three regions,

[0041]

[0042] in w n = λf 2 r n is the small hole diameter of the photon sieve before merging (the small hole diameters of the three regions are respectively enlarged to 1.5, 4, and 6 times of the original), λ is the working wavelength, f is the focal length of the new photon sieve, f n is the distance from the ce...

Embodiment 2

[0049] For a photon sieve with f=500mm, D=50mm, and λ=632.8nm, the design scheme of the photon sieve of the present invention is adopted. Using the Gaussian density modulation function, after calculation, m=987 rings are divided into 3 areas, the number of rings after partitioning is 159, and the merging periods are 3, 5, and 8 respectively, as shown in the table below

[0050]

[0051] After optimization, σ f = 1.505, μ = 0, c = 0.8 and h = 2.75

[0052] With the new design scheme, the minimum hole diameter is changed from 63.28um to 279.07um.

Embodiment 3

[0054] For the photon sieve with f=500mm, D=50mm, λ=405nm, we use a new photon sieve design scheme. Using the Weber density modulation function, after calculation, m=1542 rings are divided into 4 areas, the number of rings after partitioning is 219, and the merging periods are 3, 5, 8, and 10 respectively, as shown in the table below

[0055]

[0056] In this embodiment, the density function is a Weibull function,

[0057] f ( r n ) = c α β f ( r n h · β f ) α - 1 e - ( ...

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Abstract

The invention discloses a large area photon sieve composed of sheets with girdle band holes and characterized in that the girdle band is divided into G regions from the inner portion to the outer portion along the radius direction of the photon sieve. The regions are combined relative to the girdle band of the Phase Fresnel zone plate so as to correspondingly enhance the correspondent hole radius.The hole distribution number on each girdle band is optimized. The large area photon sieve is divided into a plurality of regions by knowing the imaging mechanism. The hole diameter in each region isamplified to a scale. Furthermore, the hole diameter of the photon sieve, especially the peripheral hole dimension is amplified by combining the girdle bands so as to basically improve the resolutionof the optical system.

Description

technical field [0001] The invention relates to an optical device, in particular to a large-area photon sieve for optical diffraction imaging. Background technique [0002] Photon sieve imaging is a new imaging method developed in recent years. The photon sieve is an optical diffraction device based on the traditional Fresnel zone plate, which replaces the transparent annulus in the zone plate with a large number of small holes. Photonic sieves have the characteristics of small size, light weight, and the spectral range can cover soft X-rays, extreme ultraviolet, etc., and these are the spectral regions that are difficult to achieve with traditional refractive or reflective optical devices. Photonic sieves have attracted extensive attention in recent years due to their broad application prospects in aerospace, astronomical observation, extreme ultraviolet lithography, physics and life sciences. Photonic sieves were first invented by Kipp et al. in 2001 based on Fresnel zon...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18G02B27/44G03F7/20
Inventor 王钦华陈志峰
Owner SUZHOU UNIV
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