System and method for automatic virtual metrology

A virtual metering and automatic technology, applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve the problems of quality assessment of unprocessed data or actual measurement data, affecting accuracy, etc.

Active Publication Date: 2009-12-09
郑芳田
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Problems solved by technology

[0003] In addition, the existing technology does not yet have the ability to conduct online and real-time quality assessment of the collected process data or actual metering data
Therefore, if the process or measurement data is abnormal, the existing technology will still use the abnormal process or measurement data to adjust the virtual measurement model, which will affect the accuracy of the prediction

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  • System and method for automatic virtual metrology
  • System and method for automatic virtual metrology
  • System and method for automatic virtual metrology

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Embodiment Construction

[0108] Please refer to figure 1 , which shows a schematic architecture diagram of a system for automatic virtual metering according to an embodiment of the present invention. The Automated Virtual Metering (AVM) system 10 at least includes a modeling server 60 and a plurality of virtual metering units 50 a and 50 b , wherein the virtual metering units 50 a and 50 b can communicate with the modeling server 60 through the Internet 62 . The virtual metering unit 50a at least includes an AVM server 30a, a process device 20a, and a metering machine 22a; the virtual metering unit 50b includes at least an AVM server 30b, a process device 20b, and a metering machine 22b. The process device 20a has multiple sets of historical process data of the workpieces that have been produced and the first process data of the first workpiece being or about to be produced; the process device 20b has the second process data of the second workpiece being or about to be produced. The measuring machine...

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Abstract

The invention relates to a system and a method for automatic virtual metrology (AVM). The AVM system comprises a modeling server and a plurality of AVM servers. The modeling server is used for constructing the first set of virtual metrology model of a processing unit (machine) of a certain type, the set of the virtual metrology model comprises a virtual metrology inferring model, a reliance index (RI) model, a global similarity index (GSI) model, a process data quality index (DQIX) model and a metrology data quality index(DQIy) model. In the AVM method, the modeling server can also transplant the first set of the virtual metrology model of the processing unit of the type to other AVM servers of the processing unit of the same type. Each AVM server accepting the transplantation can refresh in an automatic die changing manner and maintains the precision of the virtual metrology model.

Description

technical field [0001] The present invention relates to a system and method of virtual metrology, in particular to an automatic virtual metrology (Automatic Virtual Metrology) that can transplant a complete set of virtual metrology models of a certain type of machine to other machines of the same type and can ensure the accuracy of virtual metrology. Metrology; AVM) systems and methods. Background technique [0002] In the semiconductor and thin-film transistor-liquid crystal display (TFT-LCD) industry, in order to ensure the process stability of the production machine and improve the production capacity and pass rate, it is necessary to carry out on-line (On-line) monitoring for each piece of the production machine (Workpiece). Quality control, where the workpiece is called a chip in a semiconductor factory, and called glass in a TFT-LCD factory. Virtual metrology is to use the process data of the production machine to infer the quality of the product produced when the wor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/00G01M11/00
Inventor 郑芳田黄宪成黄宜婷简嘉懋
Owner 郑芳田
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