Multifunction three-dimensional displacement and topography laser interferometry system

Abstract

The invention discloses a multifunction three-dimensional displacement and topography laser interferometry system, belonging to the technical fields of photo mechanics, engineering material, structural member deformation, displacement testing, topography measurement and the like. The invention consists of a laser device, a image collecting and shooting system, a light split coupler, a light splitphotoswitch, a DC electrical source controller, a three-dimensional laser interference optical path system, a loading charging floor for putting test pieces, a bracket adjusting system, a computer and the like. The laser interferometry system can realize high-precision measurement of u, v and w displacement fields, and displacement measurement sensitivity can reach wavelength magnitude; the laserinterferometry system has two displacement measurement modes of digital holography and electronic speckle pattern interferometry, and also has the mode of digital holographic measurement of surface topography. The invention can realize the adjustment of degrees of freedom on multiple directions by using the bracket adjusting system, brings convenience for system imaging and measurement adjustment, and has the characteristics of convenient use, compact structure, high measurement precision and the like; because the system is provided with a phase shifting device, the displacement measurement precision of the system of the invention can reach nanometer magnitude after phase shifting treatment.

Description

technical field [0001] The invention relates to a three-dimensional displacement and shape laser interferometry system for component deformation and displacement testing, and belongs to the fields of photomechanics, shape measurement, engineering materials, component deformation and displacement testing technology and the like. Background technique [0002] Compared with other optical interference measurement methods, digital holography (DH) measurement method has many advantages. It can analyze the phase of the object and the microstructure analysis of the phase material; it can use its excellent phase analysis to conduct dynamic analysis on the phase material, etc. , has the characteristics of simple measuring device, non-invasive and dynamic measurement. It is often used in microelectromechanical systems (MEMS) devices, spatial microscopic particle imaging and tracking, deformation of biological samples or spatial position measurement. The resolution of the digital holog...

AI Technical Summary

Problems solved by technology

However, there are not many domestic digital microholographic instruments used in many occasions, such as the measurement and detection of the contour of transparent microscopic objects, the shape changes of transparent microscopic objects, and the electronic speckle interferometer generally only measures the plane or out-of-plane displacement.

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