Unlock instant, AI-driven research and patent intelligence for your innovation.

Laser confocal microscope system

A laser confocal and microscope system technology, applied in the field of laser confocal microscope system, can solve the problems of long optical path length, laser optical axis deviation, high center of gravity, and achieve the shortened optical axis length, compact and stable structure, and improved The effect of precision

Active Publication Date: 2009-12-30
深圳清溢光电股份有限公司
View PDF0 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The laser confocal microscope system in the prior art adopts the coaxial optical path of the laser light axis and the observation microscope objective lens. Vibration is very easy to cause deviation of the introduced laser optical axis, which affects the precision of micromachining

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Laser confocal microscope system
  • Laser confocal microscope system
  • Laser confocal microscope system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0009] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0010] see figure 1 with figure 2 An embodiment of the present invention provides a laser confocal microscope system, including a microscopic imaging part 1 and a laser introduction part 2, the microscopic imaging part 1 has a first optical axis 10, and the laser introduction part 2 has a second optical axis 20, The first optical axis 10 is parallel to the second optical axis 20 . A first reflector 21 is arranged on the second optical axis 20, a beam combining mirror 12 is arranged on the first optical axis 10, and the second optical axis 20 passes through the f...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a laser confocal microscope system, which comprises a microscopic imaging part and a laser lead-in part, wherein the microscopic imaging part is provided with a first optical axis, and the laser lead-in part is provided with a second optical axis; the first optical axis and the second optical axis are parallel; the second optical axis is provided with a first reflecting mirror, and the first optical axis is provided with a beam combiner; and the second optical axis is converged with the first optical axis through the first reflecting mirror and the beam combiner. The first optical axis of the microscopic imaging part is arranged parallel to the second optical axis; compared with the coaxial arrangement in the prior art, the parallel arrangement can ensure the length of the optical axes of the laser confocal microscope system is shortened greatly, and can ensure the structure of the system is more compact and stable so as to improve the micro-machining accuracy.

Description

technical field [0001] The invention relates to a laser confocal microscope system. Background technique [0002] The laser confocal microscope system is a microscopic observation and alignment system for laser micromachining equipment. This system also shapes and focuses the laser light to the indicated area. The laser confocal microscope system in the prior art adopts the coaxial optical path of the laser light axis and the observation microscope objective lens. Vibration is very easy to cause deviation of the optical axis of the introduced laser, which affects the precision of micromachining. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a laser confocal microscope system, which can improve the precision of laser micromachining. [0004] In order to solve the above technical problems, the present invention provides a laser confocal microscope system, including a micro imaging part and a laser introduction...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G02B17/08
Inventor 宋体涵
Owner 深圳清溢光电股份有限公司