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Method and device for preparing film by scanning and vapor deposition

A technology of equipment and scanning support, which is applied in the field of scanning evaporation film-making equipment, can solve the problems of decreased photoelectric conversion rate of glass substrate, uneven film thickness, poor quality consistency, etc., achieves high speed, improves photoelectric conversion rate and quality Good results

Active Publication Date: 2012-10-17
JINGYUNTONG TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This traditional equipment cannot guarantee the uniform thickness of the film on the substrate, often resulting in a thick film on the substrate close to the electron gun, otherwise, a thin film
However, the uneven thickness of the film greatly reduces the photoelectric conversion rate of the glass substrate, and the quality consistency is poor, making it difficult to promote and use in the market.

Method used

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  • Method and device for preparing film by scanning and vapor deposition
  • Method and device for preparing film by scanning and vapor deposition
  • Method and device for preparing film by scanning and vapor deposition

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Experimental program
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Embodiment Construction

[0017] specific implementation plan

[0018] The invention is provided with a device for swinging the electron gun in the working state, so that the electron gun can carry out spraying in the moving state. In order to achieve uniform coating.

[0019] Such as Figure 1 to Figure 6 As shown, a scanning evaporation film forming equipment is mainly composed of a plurality of electron guns 7 , a frame 1 and a vacuum chamber 2 . The electron gun is located on the swing device, and the electron gun performs spraying in a moving state.

[0020] Such as figure 1 and figure 2 As shown, the oscillating device is composed of a scanning support, a wobble plate and a transmission device. The device rotates and swings both the scanning bracket and the wobble plate.

[0021] The scanning bracket 3 is hollow T-shaped, and the upper end of the T-shaped scanning bracket is located in the vacuum cavity. The scanning bracket and the vacuum cavity are axially connected by a magnetic fluid 1...

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Abstract

The invention belongs to a device for preparing a film by scanning and vapor deposition. A device which leads an electronic gun in a working state to swing is set in the method, and the electronic gun can spray in a moving state. In the device, the electronic gun is positioned on the swing device, and the electronic gun sprays in the moving state. The method leads the electronic gun to spray and evenly coat the film in the moving state, and is convenient and easy. The device can lead the electronic gun to spray under the moving state, can evenly coat the film, has high speed, low cost and good quality, can greatly increase the photoelectric conversion rate of a base plate and greatly prolong the service life.

Description

technical field [0001] The invention belongs to a device for forming films by scanning vapor deposition. Background technique [0002] Thin-film photovoltaic cells, including CIGS photovoltaic cells, can replace monocrystalline silicon materials for solar power generation. Crystalline silicon materials as photovoltaic power generation materials are expensive, difficult to manufacture, high in cost, and difficult to promote and use. The latest science shows that several layers of metal and non-metal thin films can be deposited on glass or other material substrates by electron gun evaporation method to replace crystalline silicon materials for solar power generation. This new material is cheap and conducive to popularization. Coating several layers of metal thin films on the substrate by electron gun evaporation method requires that the thickness of the thin film must be uniform, but the current equipment is difficult to meet such requirements. The traditional electron gun ev...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/30
Inventor 冯焕培黎志欣王军
Owner JINGYUNTONG TECH CO LTD