MOEMS gyro cavity resonator and method for adjusting micro-mirror spatial state thereof

Abstract

The invention relates to an MOEMS gyro cavity resonator and a method for adjusting a micro-mirror spatial state thereof to solve the problems higher once molding difficulty and lower initial alignment precision existing in an existing method for adjusting the MOEMS gyro cavity resonator. The intermediate region of a cavity resonator baseplate is fixedly arranged, a micro-mirror and a piezoelectric ceramic wafer are respectively arranged at the upper end and the lower end of a marginal region, and the piezoelectric ceramic wafer is used for causing the deformation of the marginal region provided with the piezoelectric ceramic wafer according to the displacement of the piezoelectric ceramic wafer; and the piezoelectric ceramic wafer is arranged at the lower end of the cavity resonator baseplate and is used for causing the deformation of the marginal region provided with the piezoelectric ceramic wafer according to the displacement generated by applied voltage. The micro-mirror and the piezoelectric ceramic wafer are arranged at the marginal region of the cavity resonator baseplate, and the piezoelectric ceramic wafer can displace to cause the deformation of the cavity resonator baseplate and adjust the pitching angle and the deflection angle of the micro-mirror, thereby realizing that an once molding technology is used for manufacturing the MOEMS gyro cavity resonator, and accurately adjusting the initial alignment precision of a gyro.

Description

technical field [0001] The invention provides a MOEMS gyro resonant cavity and a method for adjusting the spatial state of a micromirror of the resonant cavity, belonging to the technical fields of laser and micro-opto-mechanical technology. Background technique [0002] As a kind of inertial instrument, gyroscope can be divided into mechanical rotor gyroscope, vibrating gyroscope, particle gyroscope, laser gyroscope and fiber optic gyroscope according to the different principles of gyro effect. Among them, the fiber optic gyroscope has developed rapidly since it was proposed by Vali and Shorthill in 1976, and the measurement accuracy has increased from the initial tens of times the earth's self-propagation rate (15° / h) to the order of less than 0.0001° / h now. With the development and maturity of MEMS (Micro-electro-mechanical Systems, micro-electro-mechanical systems) technology, it has fundamentally broken the macro barriers that people have been manufacturing inertial dev...

AI Technical Summary

Problems solved by technology

[0006] The invention provides a MOEMS gyro resonator and a method for adjusting the spatial state of the micromirror of the resonator to solve the problems of high difficulty in one-time processing and low initial alignment accuracy in the existing method for adjusting the MOEMS gyro resonator. low problem

Images