Continuous coiling and coating device of solar selective absorbing film

Abstract

The invention relates to a continuous coiling and coating device of a solar selective absorbing film, belonging to the field of surface physical vapor deposition of metal sheet strips under the vacuumcondition. The continuous coiling and coating device comprises a decoiling machine set (10) and is mainly characterized in that vacuum coating chambers comprise A low-vacuum chambers (20a,20b), an ionic processing chamber (30), a B low-vacuum chamber (40), a high-vacuum chamber (50) and five vacuum coating chambers (60); the chambers are closely connected by flanges and provided with windows on which a metal sheet strip (1) passes through; the A low-vacuum chambers (20a,20b), the ionic processing chamber (30), the B low-vacuum chamber (40), the high-vacuum chamber (50) and the vacuum coatingchambers (60) are connected with the vacuum machine set (90); and a coiling machine set (80) and a continuous-coating control system (100) are also arranged outside the vacuum coating chambers. The device has the advantages that: multilayer films and reaction films can be coated on the metal sheet strip, the thickness of the film layer can be controlled independently, the film layer is even and compact, the adhesion force is strong, and the industrial production is applicable.

Description

technical field [0001] The invention relates to the technical field of solar heat collectors, in particular to a continuous winding coating device for solar selective absorption films. Background technique [0002] Flat-plate solar collector is a basic type of collector, with simple structure, stable and reliable operation, reasonable cost, strong pressure bearing capacity, large heat absorption area, etc., it is the best choice for the combination of solar energy and buildings One of the collector types. The solar selective absorption film is one of its core components, and its performance and cost directly determine the thermal efficiency and manufacturing cost of the collector. [0003] The preparation methods of solar selective absorbing films are roughly divided into chemical coating method and vacuum coating method. For example, patent ZL91104451.5 discloses a method and equipment for preparing a solar selective absorbing layer by DC anodic oxidation and AC electroly...

AI Technical Summary

Problems solved by technology

But there is following shortcoming with regard to the disclosed vacuum coating method at present: (1) coating film layer material is single, thus affects the absorption efficiency of selective absorption film; (2) the preparation of each functional film layer cannot be in the same vacuum chamber body Continuous operation will not only affect the production efficiency, but more importantly, the environment will pollute the film layer, thereby affecting the film efficiency. For example, patent 99126652.8 discloses a kind of light-to-heat conversion efficiency, high mechanical strength and relatively simple manufacturing process. Solar energy selective absorption coating and its preparation method, the innovation point is that the active metal layer is designed to be completed by bias voltage sputtering, and the aluminum / oxygen / nitrogen composite layer is completed by magnetron sputtering

The vacuum coating equipment corresponding to the prior art is an intermittent vacuum coating equipment, but this type of equipment has the following disadvantages: (1) every time a process is completed, the vacuum chamber door must be opened to load and unload the coil, the production efficiency is low, and it is not suitable for Industrial continuous production, such as patent 200810020179.1 discloses a solar selective absorption coating and its preparation method, the preparation process is to put the substrate into the coating machine, negative voltage bombardment to clean the substrate, and then apply negative bias to energize the titanium target, Deposit TiN layer; then pass through oxygen to deposit TiO layer and TiO 2

(2) It is difficult to guarantee the consistency of coating parameters, and the product quality consistency is poor; (3) Due to poor cooling of the target, each time the substrate is loaded and unloaded, there is a certain degree of oxidation and pollution after exposure to the atmosphere, which affects the quality of the film layer

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