Laser ablation using multiple wavelengths

Abstract

In laser micromachining and laser defect repair of a first material, a first set of one or more laser wavelengths is selected in accordance with the first material's absorption characteristics and is combined and delivered concurrently with a second set of one or more laser wavelengths which is selected in accordance with the absorption characteristics of a second material generated by and remaining from the ablating interaction of the first material with the first set of laser wavelengths. The concurrent presence of the second set of one or more laser wavelengths removes the residual second material.

Description

[0001] Cross References to Related Applications [0002] This application claims priority under 35 U.S.C. 119(e) to Provisional Application No. 60 / 896,288, filed March 21, 2007, entitled "Multi-Wavelength Laser Ablation," which is hereby incorporated by reference in its entirety . Background technique [0003] The present invention generally relates to non-contact maintenance of microcircuits, and in particular to maintenance of active matrix liquid crystal display panels. [0004] In the manufacture of LC displays, large sheets of transparent glass are used as substrates for the deposition of thin-film transistor (TFT) arrays. Usually, multiple independent TFT arrays are contained on a glass substrate, and these TFT arrays are usually called TFT panels. As an option, an active-matrix LCD or AMCLD covers the display group using transistors and diodes at each sub-pixel, and thus surrounds the TFT devices. This glass substrate is also called an AMLCD panel. Flat panel display...

AI Technical Summary

Problems solved by technology

That is, the process window to obtain a clean cut without residual residue can be very narrow, making the automated removal process of this residue very difficult

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