Active vibration isolation platform

Abstract

The invention relates to an active vibration isolation platform which comprises a platform, a sensor, a controller and an electrical actuator. The active vibration isolation platform has the working principle that the sensor measures the vibrations of the groundsill and platform; the controller controls the output of the electrical actuator according to the measurement signal of the sensor and a certain control algorithm; the rotor of the motor is connected with the platform through an actuating spring, and outputs displacement or angular displacement according to the control command of the controller; the displacement output is converted to force output by the actuating spring, or the angular displacement output is converted to a moment output, thereby reducing the platform vibrations; high-frequency noise can not be transferred by the electrical actuator of the invention; and the electrical actuator of the invention has larger output stroke and output force.

Description

technical field [0001] The invention relates to vibration control, in particular to an active vibration isolation platform. Background technique [0002] There are usually three methods of vibration control: weakening the strength of the vibration source, vibration isolation and vibration absorption. Vibration isolation is to increase the vibration attenuation components between the vibration source and the vibration damper. Generally, a passive vibration isolator (PVI-Passive Vibration Isolation) composed of a spring and a damper is used, such as an air spring vibration isolator. It has been widely used because of its simple structure and reliable performance. However, passive vibration isolation has its inherent disadvantages: first, the damping ratio requirements for resonance amplification and high-frequency attenuation are contradictory, and the damping ratio must be considered comprehensively during design, and a compromise must be made; secondly, in order to increase...

AI Technical Summary

Problems solved by technology

However, passive vibration isolation has its inherent disadvantages: first, the damping ratio requirements for resonance amplification and high-frequency attenuation are contradictory, and the damping ratio must be considered comprehensively during design, and a compromise must be made; secondly, in order to increase the effective bandwidth of the vibration isolator, it is necessary to reduce the The natural frequency of the vibration isolator, but considering the structural realization and equipment installation accuracy, the support stiffness of the vibration isolator should not be too low, and the passive vibration isolator cannot attenuate low-frequency vibration

Hydraulic actuators can produce large displacement and output force, but the output bandwidth is limited and the equipment is complicated. The effective bandwidth of the same pneumatic actuator and shape memory alloy actuator is also limited, not exceeding 10Hz. Piezoelectric actuator And the output displacement of the magnetostrictive actuator is very limited, it is difficult to be competent for low frequency vibration control

[0005] The STACIS active vibration isolation platform developed by TMC uses AVI, which is composed of a piezoelectric actuator and PVI in series. Since the actuator has to bear all the load, the selected piezoelectric actuator has a diameter of 25.4mm and a height of 32mm, which is expensive.

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