Wave-front measuring instrument of collimation deflection beam and measuring method thereof

A technology of deflecting beams and testers, which is applied in the direction of testing optical performance, etc., can solve the problems of affecting test accuracy and inconvenience, and achieve the effects of high test accuracy, good system stability, and saving development costs

Inactive Publication Date: 2010-06-02
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This is very inconvenient, and the moving process may cause small changes in the position of the components in the optical system, thereby affecting the test accuracy

Method used

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  • Wave-front measuring instrument of collimation deflection beam and measuring method thereof
  • Wave-front measuring instrument of collimation deflection beam and measuring method thereof
  • Wave-front measuring instrument of collimation deflection beam and measuring method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] For a collimated and deflected beam tester with a working aperture of 10mm×10mm and a working wavelength of 632.8nm, the parameters of each device are as follows:

[0037] device

The main parameters

Mirror 1

Material BK7, caliber Φ25.4mm, reflectivity>99.5% at 45° incident

Surface accuracy PV value λ / 15

Mirror 4

Material BK7, caliber Φ50.8mm, reflectivity>99.5% at 45° incident

Surface accuracy PV value λ / 15

Mirror 5

Material BK7, caliber Φ50.8mm, reflectivity>99.5% at 45° incident

Surface accuracy PV value λ / 15

Mirror 6

Material BK7, caliber Φ50.8mm, reflectivity>99.5% at 45° incident

Surface accuracy PV value λ / 15

Beam splitting prism 7

Material BK7, diameter 50mmx50mm, transmitted energy at 45° incident: reflected energy

=7:3

Surface accuracy PV value λ / 4

doublet lens 2

Material BK7, caliber Φ25.4mm, focal length 200m...

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Abstract

The invention relates to a wave-front measuring instrument of a collimation deflection beam and a measuring method thereof, relating to the wave-front measurement of a collimation deflection beam in the optical field. The measuring instrument comprises a beam deviation device and a hearing interference light path, wherein the beam deviation device comprises a reflector and an electric combined platform controlled by a computer. The measuring method comprises the following steps: using a stripe generated by a collimation laser through the measuring instrument as a reference stripe chart; setting the action parameter of the combined platform by the computer according to the deflection angle of a beam to be measured; controlling the reflector to rotate and translate to change the propagation direction of the beam into a direction perpendicular to the translation direction of the combined platform; measuring a distorted stripe chart; and calculating the wave-front distribution of the deflected beam at an incidence hole according to a stripe-processing algorithm. By adding a device capable of changing the propagation direction of the deflected beam on a basis of a radial shearing interferometer in the quadrilateral structure, the invention can conveniently and rapidly measure the wave-front distribution of the collimation deflection beam and solve the problem that the traditional instrument can not directly measure the wave-front distribution of the collimation deflection beam.

Description

technical field [0001] The invention relates to the wavefront measurement of collimated and deflected light beams in the optical field, and is particularly suitable for the wavefront measurement of laser radar scanning light beams. technical background [0002] In the field of scientific research and national defense, it is often necessary to perform high-precision detection of the wavefront of the collimated deflected beam, such as testing the wavefront of the collimated beam passing through the deflection device (blazed grating, etc.), testing the wavefront of the laser radar scanning beam, etc. Here the wavefront refers to the phase distribution of the beam on the plane under investigation. According to the results of the wavefront test, the beam quality can be diagnosed, so as to judge the performance of the optical system. This is especially important in the lidar system. If the scanning beam of the lidar has poor beam quality in the near area, it will have a great imp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 郑春艳刘艺吴健冯胜
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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