Automatic transmission device for reshipping quartz boat

Abstract

The invention relates to an automatic transmission device for reshipping a quartz boat, solving the problems that the traditional manual operation has poor reliability and low efficiency, the existing transmission device is constrained by the structure to affect the moving range, and the like. The automatic transmission device comprises a frame, a lifting arm, a gripper mechanism and an electric control device and is characterized in that the lifting arm is connected with an active rotating arm and a passive rotating arm on the lifting arm to be with the gripper mechanism to form a four-link adjusting mechanism. The active rotating arm on the lifting arm is fixed on a transmission shaft driven by an arm rotating motor, and the telescopic arm of the active rotating arm is hinged at one end of the gripper mechanism. The passive rotating arm on the lifting arm is fixed on a driven shaft, and the other end is hinged on the gripper mechanism. The automatic transmission device has the advantages of reasonable design, simple transmission structure, wide moving range, fast and accurate transmission positioning control, easy installation, convenient debugging and maintenance, significant increase in carrying capacity and safe and reliable operation, improving the operational efficiency of heat treatment equipment, and avoiding damage of silicon wafer and solar cells.

Description

technical field [0001] The invention relates to an automatic transfer device for IC manufacturing process and solar cell manufacturing process, in particular to a quartz crystal for carrying and transferring wafers or solar cells between a loading workbench and a heat treatment equipment horizontal furnace. Automatic transfer device for boats. Background technique [0002] In the IC process and solar cell process for producing semiconductor silicon wafers, it is necessary to heat-treat the semiconductor material silicon wafers or solar cells multiple times to achieve the required characteristics. During the heating process, the quartz boat loaded with wafers needs to be placed in the furnace tube; when heated to a specific temperature, the quartz boat needs to be moved out of the furnace tube. A typical set of furnace tubes (such as: horizontal diffusion furnace) equipment mainly includes: a plurality of parallel parallel furnace tubes and a quartz boat transmission device....

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to provide an automatic transfer device for reloading quartz boats, which solves the problems of poor reliability and low efficiency of traditional manual operation, and the existing transfer device is restricted by structure and affects the range of motion of movement. Its design is reasonable, the transmission structure is simple, the moving range is wide, and the transmission positioning control is fast and accurate, the installation is easy, the debugging and maintenance are convenient, the carrying capacity and the safety and reliability of the operation are significantly increased, and the operating efficiency of the heat treatment equipment is improved. Avoid Wafer or Solar Cell Breakage

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