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Bolometer and manufacturing method thereof

A measuring meter and radiant heat technology, which is applied in the field of infrared detectors, can solve problems such as flexible and changeable design structures, and achieve the effects of flexible design, optimized performance, and improved flexibility

Active Publication Date: 2011-05-11
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved in the present invention is to optimize the resistance structure of the thermistor and combine the change of the doping concentration of the thermistor material to solve the problem that the previous bolometer only relied on changing the doping concentration of the thermistor material to make it Meet the performance requirements, so as to achieve the purpose of flexible and changeable design structure

Method used

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  • Bolometer and manufacturing method thereof
  • Bolometer and manufacturing method thereof

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Embodiment Construction

[0023] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0024] see figure 1 , the bolometer provided by the present invention, the device is a traditional bridge structure, including: a substrate 1, a support layer 3 above the substrate 1, a lower electrode 4 made on the support layer 3, and a lower electrode 4 prepared There is a thermistor 5, the thermistor 5 is covered with an upper electrode 7, and an absorption layer 8 is prepared on the upper electrode 7, wherein the substrate 1 and the support layer 3 are arranged in parallel with a gap, and the thermistor 5 is divided into independent unit groups It is arranged in parallel between the upper electrode 7 and the lower electrode 4 . The independent units of the thermistor 5 are evenly spaced. The space between each independent unit of the thermistor 5 is filled with silicon nitride material to form an isolation layer 6 . The material constituting the therm...

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Abstract

The invention provides a bolometer and a manufacturing method thereof. The resistance value of thermistors of the bolometer can accord with design specification by changing the structures and the doping density of the thermistors so as to meet the application requirement. The structure thereof comprises a base, a support layer positioned above the base, a lower electrode manufactured on the support layer, thermistors manufactured on the lower electrode, an upper electrode covering the thermistors and an absorbing layer manufactured on the upper electrode, wherein the base and the support layer are parallel to each other and are arranged at intervals, and the upper electrode, the lower electrode and the thermistors are electrically connected in parallel. The thermistors are arranged at intervals between the upper electrode and the lower electrode. The structural arrangement enables the resistance value of the thermistors to be adjustable in a large range, optimizes the performances of devices and meets different application requirements, thereby greatly improving the flexibility of design.

Description

technical field [0001] The invention relates to an infrared detector, in particular to a bolometer obtained by changing the structure of a thermistor. Background technique [0002] A bolometer is a thermistor-type detector and is one of the most successfully developed infrared detectors currently. A bolometer detects energy based on the property of a thermistor, typically made of a metal or semiconductor material, to change its resistance when exposed to a radiant flux. When the detector absorbs the infrared radiation power ΔW, the temperature changes ΔT, and the resistance of the thermistor changes ΔR, and the change in resistance is converted into a change in voltage or current by using the readout circuit (ROIC), and the corresponding value can be obtained Infrared radiation power. [0003] Since the technology declassification in the United States in 1992, the research on bolometers has experienced a stage of rapid development. People have studied bolometers based on ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/20
Inventor 胥超徐永青
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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