Sensor device

A sensor device, acceleration sensor technology, applied in the direction of measuring devices, instruments, measuring acceleration, etc., can solve problems such as changes

Active Publication Date: 2010-08-11
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A disadvantage of this sensor arrangement is that an offset of the moving mass in one of the two detection directions leads to a change in the sensor sensitivity with respect to the other detection direction, since the fixed and Fundamental capacitance change between moving finger electrodes in the other detection direction

Method used

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Embodiment Construction

[0017] figure 1A schematic top view of a sensor device 1 according to an exemplary embodiment of the invention is shown, the sensor device 1 having a substrate 2 with a main plane of extent 100 . The sensor device 1 also has a seismic mass 3 in the form of a frame 3', which is fixed on an anchor element 5 by means of a fifth spring element 4 in such a way that the frame 3' can move relative to the base 2, wherein the frame 3 ′ is likewise configured to be movable about a first direction 11 parallel to the main plane of extension 100 and about a second direction 21 parallel to the main plane of extension 100 and perpendicular to the first direction 11 . These fifth spring elements 4 are preferably configured to be rigid with respect to movement perpendicular to the main plane of extension 100 . The anchoring element 5 basically has the shape of a cross, wherein the central area of ​​the cross 5' is fixedly anchored on the base 2, and the four ends of the cross 5' are connected...

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Abstract

The invention provides a sensor device, in particular to an acceleration sensor device; the sensor device is provided with a base having a main extending plane and an oscillator mass capable of movably hanging in relative to the base, wherein the sensor device comprises a first detecting element used for detecting the first movement of the oscillator mass along with the first direction parallel to the main extending plane, and the sensor device comprises a second detecting element used for detecting the second movement of the oscillator mass along the second direction parallel to the main extending plane and vertical to the first direction, wherein both the first detecting element and the second detecting element are respectively capable of being fixed on the oscillator mass movably in relative to the oscillator mass.

Description

technical field [0001] The invention relates to a sensor device. Background technique [0002] Such sensor arrangements are well known. For example, publication US 7 134 340 B2 discloses a two-axis acceleration sensor with a mass movable relative to a substrate. The moving mass is fixed on the base by means of a mass holding device in such a way that when the two-axis accelerometer is accelerated parallel to the main plane of extension of the base, the moving mass can be deflected relative to the base due to acceleration forces acting on the moving mass . In this case, the moving mass can be deflected from the rest position parallel to the main extension plane in two mutually independent detection directions, so that the two-axis acceleration sensor is sensitive with respect to these two detection directions. The deflection of the moving mass from the rest position along one of the two detection directions is capacitively measured in each case by means of interleaved, fix...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/18
CPCG01P15/18G01P15/125G01P2015/082
Inventor A·弗兰克
Owner ROBERT BOSCH GMBH
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