Film coating manufacturing process of capacitive touch screen

A technology of capacitive touch screen and production process, applied in metal material coating process, sputtering coating, ion implantation coating and other directions, can solve the problems of blurred image characters, serious reflection of capacitive screen, color distortion, etc.

Inactive Publication Date: 2010-09-15
SHENZHEN LEAGUER OPTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The shortcomings of the capacitive screen produced by the existing technology are: the capacitive screen is seriously reflective, there is a problem of color distortion, and the image characters are blurred due to the ref...

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Before the coating, the semi-tempered glass substrate is cleaned and dried by heat, and then placed on the shelf for SiO coating 2 +ITO film, the coating adopts Lihe Thin Film Technology vertical automatic continuous magnetron sputtering coating machine, the substrate heating temperature is 280°C, the transmission speed frequency of the coating room is 17.0HZ, and SiO is plated in the No. 4 room 2 , SiO 2 Sputtering power 3500W, O 2 The flow rate is 35Sccm, the Ar flow rate is 200-220Sccm, and the vacuum degree is 3.0×10 -1 Pa~4.5×10 -1 Between Pa, the total air pressure is 0.40-0.45Pa, use 2 SiO2 targets to coat SiO2 film, use 2 ITO targets to coat ITO film, and 8 MoAlMo targets to coat MoAlMo film, the Ar flow rate in the coating chamber is 200-220Sccm, coating Chamber vacuum 4.0*10 -1 Pa~4.5*10 -1 Pa between. Test results: the SiO2 film thickness of the base layer is SiO2 transmittance is 90.5%; ITO film thickness The surface resistance of ITO film is 100Ω / ...

Embodiment 2

[0040] Before the coating, the semi-tempered glass substrate is cleaned on a flat plate, heat-dried and dried, and then placed on the shelf to be coated with SiO2+ITO film. The coating adopts a vertical automatic continuous magnetron sputtering coating machine of Lihe Thin Film Technology, and the substrate is heated. The temperature is 260°C, the transmission speed frequency of the coating chamber is 17.0HZ (the substrate transmission speed of the coating chamber), SiO2 is plated in the No. 4 chamber, the SiO2 sputtering power is 3300W, the O2 flow rate is 35Sccm, the Ar flow rate is 200~220Sccm, and the vacuum degree is 3.0×10 -1 Pa~4.5×10 -1 Between Pa, the total air pressure is 0.40-0.45Pa, use 2 SiO2 targets to coat SiO2 film, use 2 ITO targets to coat ITO film, and 8 MoAlMo targets to coat MoAlMo film, the Ar flow rate in the coating chamber is 200-220Sccm, coating Chamber vacuum 4.0*10 -1 Pa~4.5*10 -1 Pa between. Test results: the SiO2 film thickness of the base laye...

Embodiment 3

[0042] Before the coating, the semi-tempered glass substrate is cleaned on a flat plate, heat-dried and dried, and then placed on the shelf to be coated with SiO2+ITO film. The coating adopts a vertical automatic continuous magnetron sputtering coating machine of Lihe Thin Film Technology, and the substrate is heated. The temperature is 230°C, the transmission speed frequency of the coating chamber is 16.50HZ (the substrate transmission speed of the coating chamber), SiO2 is plated in the No. 4 chamber, the SiO2 sputtering power is 3000W, the O2 flow rate is 35Sccm, the Ar flow rate is 200-220Sccm, and the vacuum degree is 3.0×10 -1 Pa~4.5×10 -1 Between Pa, the total air pressure is 0.40-0.45Pa, use 2 SiO2 targets to coat SiO2 film, use 2 ITO targets to coat ITO film, and 8 MoAlMo targets to coat MoAlMo film, the Ar flow rate in the coating chamber is 200-220Sccm, coating Chamber vacuum 4.0*10 -1 Pa~4.5*10 -1 Pa between. Test results: the SiO2 film thickness of the base lay...

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PUM

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Abstract

The invention relates to a film coating manufacturing process of a capacitive touch screen. The process comprises the following steps of: carrying out flat plate cleaning and hot drying on a half-toughened glass substrate before film coating, shelving, mounting a film and coating an SiO2+ITO film, and carrying out the film coating by using a full automatic vertical continuous magnetron sputtering film coating machine, wherein the temperature range of the film coating is set as 180-280 DEG C and the transmission speed frequency of the film coating chamber is 15.0-17.0 Hz; coating an SiO2 film by using two SiO2 targets and an ITO film by using two ITO targets; etching and processing semi-finished product glass coated with the SiO2+ITO film through a circuit diagram and coating an MoAlMo film by using eight MoAlMo targets; and etching and processing a semi-finished product glass coated with the MoAlMo film through the circuit diagram and coating an SiO2 protective film by using the two SiO2 targets. The invention has low production system cost and low energy consumption, and can improve electricity utilization efficiency; the product produced by using the invention does not need mechanical devices, is more durable and has the identification direction from a single point touch to a multipoint touch and the identification position of the multipoint touch.

Description

Technical field: [0001] The invention relates to a coating production process of a capacitive touch screen, which belongs to the capacitive touch screen manufacturing process for realizing the function of operating and controlling black and white and color liquid crystal display components in TN / STN / CF / TFT black and white and color liquid crystal display components technology field. Background technique: [0002] With the advancement of science and technology, TN / STN / CF / TFT black and white and color liquid crystal display components are widely used in display components of electronic products such as car GPS navigation, laptop computers, LCD TVs, and mobile phones. Capacitive touch screen is the most convenient and practical way to operate flat panel display devices. The capacitive touch screen is composed of double-sided ITO and single-sided MoAlMo. The double-sided ITO glass of the capacitive touch screen can not only protect the conductors and sensors, but also effective...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/06
Inventor 胡安春吴勇温景成吴永光董坚
Owner SHENZHEN LEAGUER OPTRONICS
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