Method for compensating signal of high-precision pressure sensor

Abstract

The invention discloses a method for compensating a signal of a high-precision pressure sensor. The method comprises the following steps of: inputting a pressure measuring signal and a temperature measuring signal measured by a pressure sensor into a digital signal processor; converting an original pressure signal into a pressure signal which is not subjected to temperature compensation and capable of eliminating lagging errors through a lagging error compensation method; carrying out temperature correction on the pressure signal through a signal interface processing method to acquire the pressure signal subjected to the temperature correction; and processing the pressure signal and the temperature signal subjected to the temperature correction to acquire a pressure signal and a temperature signal subjected to temperature compensation and non-linear error compensation through a temperature compensating method. The invention can compensate lagging errors and non-linear errors of the pressure sensor and errors caused by the change of the environment temperature, and can improve the measurement precision of the pressure sensor.

Description

Technical field: [0001] The invention belongs to the field of signal processing, and relates to a sensor signal compensation method, in particular to a compensation method for nonlinear errors, hysteresis errors and errors caused by temperature changes of silicon pressure sensors. Background technique: [0002] Silicon pressure sensors are the most successful sensor products in micromechanical technology. There are mainly three types: silicon piezoresistive, capacitive and resonant, among which silicon piezoresistive is the most widely used. Silicon piezoresistive pressure sensors are made using the piezoresistive effect of semiconductor material silicon, the principle of Wheatstone bridge, integrated circuit technology and micromachining technology. Silicon piezoresistive pressure sensors have been widely used as miniature vacuum gauges, absolute pressure gauges, flow meters, flow meters, acoustic sensors, pneumatic sensors, etc. Process controllers, etc., are used in cutt...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the deficiency that the hysteresis error cannot be compensated in the measurement of the existing silicon pressure sensor and improve the measurement accuracy of the silicon pressure sensor, to provide a method that can compensate the hysteresis error and at the same time compensate the nonlinear error of the silicon pressure sensor High-precision signal processing method for errors caused by temperature and temperature changes

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