High-precision ball rotating mechanism
A rotating mechanism and high-precision technology, applied in measuring devices, instruments, optical devices, etc., can solve problems such as silicon ball surface damage, achieve high repeat positioning accuracy, simple assembly and adjustment process, and avoid spherical changes.
Inactive Publication Date: 2010-11-03
TSINGHUA UNIV
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Problems solved by technology
At present, the most accurate length measuring instrument is the laser interferometer, but the laser interferometer can only obtain the length information at a specific position, and the surface shape of the silicon sphere is uneven. In order to obtain the information of the entire surface of the silicon sphere, it is necessary to A mechanism that can rotate silicon balls. It is required that the mechanism can theoretically rotate the silicon balls to any position on its surface, and has extremely high repeat positioning accuracy, and at the same time, it cannot cause damage to the surface of the silicon balls. Currently, there is no such mechanism. A ball rotation mechanism that satisfies this requirement
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[0016] The structure and effect of the present invention will be described in detail by citing the following embodiments in conjunction with the accompanying drawings.
[0017] Such as Figure 1 ~ Figure 3 As shown, it is a high-precision ball rotation mechanism 1 provided by the present invention, which includes a ball support part 10, a ball rotation scanning part 20 and a control device, wherein:
[0018] The ball supporting part 10 includes a fixed base 11 , a plurality of adjusting screws 12 , an adjustable base 13 , four supporting columns 14 , a supporting base 15 and three supporting nails 16 .
[0019] The fixed base 11 is used to support and fix the entire rotating mechanism. The adjustable base 13 is connected with the fixed base 11 through each adjusting screw 12 . In this embodiment, there are eight adjusting screws 12, four of which are evenly distributed in the center around the adjustable base 13, and these four adjusting screws 12 are used to adjust the left...
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The invention relates to a high-precision ball rotating mechanism which comprises a ball support part, a ball rotation scan part and a control device, wherein the ball support part comprises a fixed base, a plurality of adjusting screws, an adjustable base, four support columns and a support base, the adjustable base is connected with the fixed base by the adjusting screws, the four support columns are arranged at the four corner angles of the adjustable base, the support base is propped up and fixed above the adjustable base, the ball support part is arranged in a recess at the center of the support base, and the ball support part is provided with three ball support points of which the heights are strictly the same; the ball rotating scan part is arranged in a containing space formed by the adjustable base, the four support columns and the support base, and comprises an elevating mechanism arranged at the center of the adjustable base and a horizontal rotating mechanism and a vertical rotating mechanism which are arranged on the elevating mechanism; and the control device is a computer which is provided with a control program to control the elevating mechanism, the horizontal rotating mechanism and the vertical rotating mechanism to operate according to the work flow.
Description
technical field [0001] The invention relates to a measuring device of precision machinery, in particular to a high-precision ball rotating mechanism capable of rotating and positioning a ball. Background technique [0002] In the field of precision measurement, it is often necessary to measure the fine parameters of a ball of a certain size, including the distribution uniformity of the surface roughness of the ball, the diameter at a specific point, roundness, etc., which requires precise rotation and positioning of the ball. However, existing measuring instruments often do not have these functions. For example, in the measurement of Avogadro's constant NA, it is necessary to accurately measure the surface shape information of a silicon sphere with a diameter of about 94mm, a roundness of less than 100nm, and a roughness of about several nanometers. At present, the most accurate length measuring instrument is the laser interferometer, but the laser interferometer can only o...
Claims
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Login to View More IPC IPC(8): G01B11/00G01B11/10G01B11/24G01B11/06
Inventor 张继涛李岩吴学健
Owner TSINGHUA UNIV