Discharge apparatus and discharge method

Abstract

The invention relates to a discharge apparatus and discharge method, which is used for detecting and correcting the inclination, on rotating direction in the horizontal plane, of a substrate moving part which moves substrates along two guide rails. The discharge apparatus of the invention comprises a first main interference device (62a) and a second main interference device (62b), and a first main mirror device (61a) and a second main mirror device (61b), which can measure the inclination on rotating direction in the horizontal plane of the substrate moving part (20). During the movement of the substrate moving part (20), amount of movement on the two guide rails are respectively controlled according to the measurement results, so as to enable the inclination to be the same as that of before movement. The discharge apparatus comprises a first secondary interference device (62c) and a second secondary interference device (62d), and a secondary mirror device (61c), which can measure the position of the substrate moving part (20) in the X-axis direction. During the movement of the substrate moving part (20), the movement of a head (32) is controlled to move according the measurement results, and the relative position of the head (32) and the substrate moving part (20) in the X-axis direction is enabled to be the same as that of before movement, so that the discharge liquid discharged from a discharge nozzle (35) is enabled to hit the positions to be hit on a substrate (50).

Description

Technical field [0001] The invention relates to a spray device and a spray method. Background technique [0002] With the development of the information society in recent years, the demand for larger liquid crystal display devices has sharply increased, and it is desired to improve their productivity. In a color liquid crystal display device, color filters are used in order to color display images. The color filter is made by arranging R (red), G (green), and B (blue) inks in a predetermined pattern in a predetermined area on a substrate. Ink ejection mostly uses an inkjet method. [0003] At present, most ejection devices have a base that is stationary with respect to a reference surface, a substrate moving part that can move in a first direction on the base, and can move in a second direction perpendicular to the first direction and parallel to the reference surface. The head holding part. [0004] In the apparatus described in Patent Document 1, a head movement method is adopt...

AI Technical Summary

Problems solved by technology

The problem with the head moving method is that it takes a long time to discharge the ink in proportion to the increase in the size of the substrate, and it is difficult to control the head to uniformly hit the ink at predetermined intervals.

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