Vibrating diaphragm and microphone comprising vibrating diaphragm
A technology of microphone and vibrating part, which is applied in the field of microphone, can solve the problem that the stress gradient cannot be released, and achieve the effect of improving performance and sensitivity
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[0014] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0015] The diaphragm provided by the invention is used in microelectronic devices, such as silicon capacitor microphones, loudspeakers, receivers and the like. Silicon condenser microphones are mainly used in electronic devices such as mobile phones to receive sound.
[0016] see figure 1 , figure 2 , the first embodiment provided by the present invention. The diaphragm 1 provided by the present invention includes a vibrating part 11 and a supporting part 12 connected to the vibrating part 11 , and the supporting part 12 extends outward from the outer circumference of the vibrating part 11 .
[0017] The vibrating membrane 1 is provided with at least one center line, and all the supporting parts 12 are located on the same side of the center line.
[0018] The supporting part 12 includes at least two beams, and the beams are unevenly distributed on ...
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