Valveless piezoelectric pump of elliptical combined pipe
A valveless piezoelectric pump and combined tube technology, applied in the direction of pumps, pump components, variable capacity pump components, etc., can solve the problems of large size of the confluence tube and shunt tube, difficult processing and fabrication, and unfavorable micro-integration. To achieve the effect of easy flow control, significant energy saving effect and simple structure
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[0013] Such as Figure 1-3 , the present invention includes a pump body 8, a pump cover 2 and a piezoelectric vibrator 5, the pump body 8 and the pump cover 2 are electrostatically bonded together, and the piezoelectric vibrator 5 is fixed at the center of the lower part of the pump body 8 by an adhesive. A pump inlet 1 and a pump outlet 3 are processed on the pump cover 2, and the pump inlet 1 and the pump outlet 3 are externally connected with an inlet pipe and an outlet pipe respectively. Two inlet flow tubes 4, outlet flow tubes 7 and pump cavity 6 of the same structure are processed on the pump body 8 by using MEMS processing technology, wherein the pump cavity 6 is located between the inlet flow tube 4 and the outlet flow tube 7, and the inlet flow tube The pipe 4 and the outlet flow pipe 7 communicate with the pump chamber 6 respectively, and the three communicate with each other. The two inlet flow tubes 4 and outlet flow tubes 7 of the same structure are arranged coa...
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