Microwave diode-based dynamic strain measuring device
A technology of dynamic strain and measurement devices, applied in the field of strain measurement, can solve the problems of calibration, high cost, and limitation, and achieve the effect of solving zero drift and creep
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[0026] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0027] attached figure 1 It is a structural diagram of a single crystal silicon thin film flexible microwave diode dynamic strain sensor. The substrate includes PET plastic 1 and an adhesive layer 2 to support the main part of the microwave diode dynamic strain sensor. The single crystal silicon thin film flexible microwave diode is on the PET plastic substrate 1 (other types of ordinary plastic or flexible materials can be used as the substrate substrate), and there is a layer of SU8 material layer 2 on the surface of the PET plastic as an adhesive layer. The main part of the work of the thin-film flexible microwave diode strain sensor is a thin-film PIN diode made of doped single-crystal silicon. In the figure, 3, 4, and 5 represent the P-type doped region and the undoped region of the single-crystal silicon thin film, respectively. , and ...
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