Appearance detection method and system of image sensor

Abstract

The invention provides appearance detection method and system of an image sensor, which is applicable to the technical field of chip manufacture procedures. The method comprises the following steps of: carrying out optical amplification imaging on the image sensor; extracting images of light sensing regions of the image sensor from images obtained through optical application imaging, and further obtaining binary images; judging that the light sensing region of the image sensor has defects if the value of the communication region area of the identical character pixels in the binary images is greater than a standard threshold value; and judging that the appearance of the light sensing region of the image sensor is normal if the value of the communication region area is not greater than the standard threshold value, wherein the pixels corresponding to the standard threshold values have the same color characteristics as the pixels in the communication region. The invention can efficiently and accurately carry out automatic detection on the light sensing region defects on the image sensor, the whole process can be conveniently integrated into the existing automation manufacture procedures, the manual participation is not needed in judgment, and the consistency of the detection standard can be ensured, so the detection quality is improved.

Description

technical field [0001] The invention belongs to the technical field of chip manufacturing process, and in particular relates to an appearance detection method and system of an image sensor. Background technique [0002] The quality of image sensors such as Charge Coupled Device (CCD) and metal oxide semiconductor (Complementary Metal-Oxide Semiconductor, CMOS) directly affects the quality of back-end application products. After CMOS, CCD and other image sensors are packaged , must be inspected to ensure its high quality, and the efficiency and quality of these image sensor quality inspections also have a certain impact on the listing process of its back-end application products. This process is currently mainly done manually with the help of a microscope, but this manual detection method is limited by the minimum resolution of the human eye, and there are the following problems in terms of detection efficiency and quality: [0003] 1. Increase the exposure time of component...

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Problems solved by technology

[0008] The purpose of the embodiments of the present invention is to provide an image sensor appearance detection method and system, aiming at solving the problems of low efficiency and low detection quality of manual detection at present

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