Unlock instant, AI-driven research and patent intelligence for your innovation.

Preparation method of chemical and mechanical polishing liquid of tungsten-molybdenum alloy material

A technology of chemical machinery and tungsten-molybdenum alloy, which is applied in the direction of polishing compositions containing abrasives, can solve the problems of inability to prepare high-purity polishing liquid, lower device yield, and scrapping of polishing liquid, so as to improve production efficiency and production quality , improve the yield, improve the effect of polishing quality

Inactive Publication Date: 2013-06-05
TIANJIN JINGLING MICROELECTRONIC MATERIALS CO LTD
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

After the resulting polishing solution is filtered, the yield rate further drops significantly
Secondly, the open mechanical stirring method and preparation equipment contain organic matter, metal ions, large particles and other harmful components, which will inevitably enter the polishing liquid during the stirring process. The prepared polishing liquid usually contains metal ions on the order of several ppm Above, it is impossible to prepare high-purity polishing liquid, resulting in the increase of cost in subsequent processing and the reduction of device yield
Especially when the contamination concentration of strong electrolyte metal ions such as sodium ions is too high, the silica sol will gel, causing the polishing fluid to be scrapped

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method of chemical and mechanical polishing liquid of tungsten-molybdenum alloy material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] (1) Use ultra-pure deionized water with a resistance of 18MΩ to clean the transparent polyethylene material airtight reactor and feed pipe three times, so that the resistance of the waste liquid after cleaning is not lower than 16MΩ.

[0026] (2) SiO 2 1920g of nano-scale silica sol with a mass percentage concentration of 50% and a particle size of 15-25nm and Al with a particle size of 200-500nm 2 o 3 Add 80g of powder into the cleaned transparent airtight reactor, so that the transparent airtight reactor is in a negative pressure and complete vortex state, and under the action of complete eddy current stirring, it is drawn in under the action of negative pressure while stirring, and the resistance is 18MΩ. 1880g of ionic water to obtain a diluted silica sol solution.

[0027] (3) Add 40 g of FA / O surfactant and 40 g of FA / O chelating agent into the transparent and airtight reaction kettle through the cleaned pipeline while performing complete vortex stirring, and co...

Embodiment 2

[0030] (1) Use ultra-pure deionized water with a resistance of 18MΩ to clean the transparent polyethylene material airtight reactor and feed pipe three times, so that the resistance of the waste liquid after cleaning is not lower than 16MΩ.

[0031] (2) SiO 2 2300g of nano-scale silica sol with a mass percentage concentration of 50% and a particle size of 15-25nm and Al with a particle size of 200-500nm 2 o 3 Add 100g of powder into the cleaned transparent airtight reactor, so that the transparent airtight reactor is in a negative pressure and complete vortex state, and under the action of complete eddy current stirring, it is drawn in under the action of negative pressure with a resistance of 18MΩ. 1500g of ionic water to obtain a diluted silica sol solution.

[0032] (3) Add 40g of JFC and 30g of FA / O chelating agent into the transparent and airtight reaction kettle through the cleaned pipeline while performing complete vortex stirring, and continue to maintain a complete ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle diameteraaaaaaaaaa
particle diameteraaaaaaaaaa
electrical resistanceaaaaaaaaaa
Login to View More

Abstract

The invention relates to a preparation method of chemical and mechanical polishing liquid of a tungsten-molybdenum alloy material, aiming at providing a method for preparing polishing liquid by using negative-pressure vortex stirring to avoid gelatin or dissolution of silica solution, prevent harmful substance from entering the polishing liquid and improve the purity of the polishing liquid. The method comprises the following steps of: cleaning a transparent closed reactor and a feed pipe thereof by using ultra-pure deionized water with the resistance of 18megohm; adding mixed abrasive sol inthe transparent closed reactor, vacuumizing the transparent closed reactor so that the mixed abrasive sol in the reactor is under the negative-pressure complete vortex state and is subjected to vortex stirring, and adding the ultra-pure deionized water with the resistance of 18megohm while carrying out vortex stirring; pumping a surface active agent and FA / O chelant in the transparent closed reactor under the action of negative pressure while carrying out vortex stirring; and pumping an alkaline pH value regulator in the transparent closed reactor under the action of negative pressure while carrying out vortex stirring to adjust the pH value to be 10-11 and carrying out even vortex stirring to obtain the polishing liquid.

Description

technical field [0001] The invention belongs to material surface treatment technology, in particular to a preparation method of chemical mechanical polishing liquid for tungsten-molybdenum alloy material. Background technique [0002] Both tungsten and molybdenum are silvery-white shiny metals. Tungsten and molybdenum are very inactive at room temperature and do not react with most non-metals (except fluorine). They have the characteristics of high hardness, wear resistance and corrosion resistance, and are widely used In the manufacture of alloys and other fields. Tungsten and molybdenum can form many heteropoly compounds with excellent properties. Because tungsten and molybdenum have excellent physical, mechanical, anti-corrosion and nuclear properties, it is of great practical value to study the surface planarization process of tungsten-molybdenum alloys. At present, the biggest difficulty in smoothing the surface of tungsten-molybdenum alloys is the low removal rate an...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/02C23F3/04
Inventor 刘玉岭潘国峰陈海涛
Owner TIANJIN JINGLING MICROELECTRONIC MATERIALS CO LTD