TFT-LCD array substrate and manufacture method thereof

Abstract

The invention relates to a TFT-LCD array substrate and a manufacture method thereof. The TFT-LCD array substrate includes gate lines and data lines, pixel electrodes and thin film transistors are formed in the pixel areas defined by the gate lines and data lines, the gate lines and data lines are positioned on the same layer, the pixel electrodes are formed on the insulating layer which is covering on the gate lines and data lines. Source electrode and drain electrode of the thin film transistor are positioned on the same layer where the gate lines are located; a doped semiconductor layer is formed on the source electrode and drain electrode, the semiconductor layer is formed on the doped semiconductor layer and covers channels between the source electrode and drain electrode, the gate electrode of the thin film transistor is formed on the insulating layer, the gate electrode is connected with the gate lines by a third through hole provided in the insulating layer. The invention is characterized in that only an insulating layer exists between the two plate electrodes of a storage capacitor, which allows the capacitance stored in unit area to be improved; simultaneously, the invention adopts the technical proposal which comprises firstly forming the channel and secondly forming the semiconductor layer, defects due to over etching or incomplete etching will not exist in TFT channel area, so that the yield rate is increased.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. [0003] TFT-LCD is mainly composed of an array substrate and a color filter substrate in a box, wherein thin-film transistors and pixel electrodes arranged in a matrix are formed on the array substrate, and each pixel electrode is controlled by a thin-film transistor. When the thin film transistor is turned on, the pixel electrode is charged during the turn-on time, and after the charging is completed, the voltage of the pixel electrode will be maintained until recharging in the next scan. Generally speaking, the liquid cry...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a TFT-LCD array substrate and its manufacturing method, which can not only effectively increase the storage capacitance per unit area, but also overcome the defects of over-etching or incomplete etching in the existing TFT channel region

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