Capacitor and manufacturing method thereof
A technology of capacitors and electrodes, which is applied in the field of semiconductor devices, can solve problems such as complex processes, and achieve the effect of simple processes and improved capacitance
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[0034] The present invention provides a capacitor, the capacitor includes a first electrode, a first dielectric layer on the first electrode, a silicon nanocrystal on the first dielectric layer, a silicon nanocrystal and the A second dielectric layer on the exposed portion of the first dielectric layer, a second electrode on the second dielectric layer. The silicon nanocrystals increase the interface area between the dielectric layer and the electrode, and when the capacitor is charged, more charges are attracted to the interface, thereby increasing the capacitance of the capacitor.
[0035] Specific examples reference figure 2 , figure 2 A schematic diagram of the structure of the capacitor according to the first embodiment of the present invention is given, and the capacitor includes a first electrode 207, and the first electrode is made of such as doped polysilicon, a compound of a conductive material, or a metal; the first electrode 207 has a first length and a first w...
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