Five tube-type silicon chip conveying device
A technology for conveying devices and silicon wafers, which is applied in the direction of conveyor objects, transportation and packaging, sustainable manufacturing/processing, etc., can solve the problems of small footprint, high thermal efficiency, and inability to meet the requirements of sintering process, and achieve the reduction of metal ions stained effect
Inactive Publication Date: 2011-05-11
EGING PHOTOVOLTAIC TECHNOLOGY CO LTD
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Problems solved by technology
If it shrinks, it cannot meet the requirements of sintering process
In addition, the high temperature resistant mesh belt needs to circulate around the inside and outside of the furnace during operation, and the mesh belt part is accompanied by the heating and cooling process of the silicon wafer. Therefore, during the operation, the mesh belt will carry a large amount of heat from the furnace. heat, and this part of heat will all be used as loss, which not only causes a lot of energy waste, but also increases the temperature of the working environment. Therefore, the applicant has developed a non-mesh belt silicon cell sintering furnace, which can be well To overcome the shortcomings of the existing mesh belt tunnel sintering furnace, this equipment has a small footprint, high thermal efficiency, low power consumption, and remarkable energy-saving effect
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[0023] The five-tube silicon wafer conveying device, such as Figure 2 to Figure 7 As shown, it consists of a fixed frame 12, a fixed frame 32, two fixed brackets 41, a sliding plate 17, a sliding plate 37, three movable brackets 42 and an ear seat 43, and the fixed bracket 41 is composed of a quartz glass tube 411 , a metal sleeve 412, a support foot 413 and a limit screw 414. On the quartz glass tube 411, limit holes 415 are opened at equal distances in the axial direction, and a threaded hole 416 and an opening 417 are arranged on the metal sleeve 412. The sleeve 412 is fixed on the quartz glass tube 411 at equal intervals through the limit screws 414; the support feet 413 are made of steel wire, and the surface of the steel wire is coated with a ceramic coating 418, and the inner end of the support feet 413 is fixed on the metal sleeve 412, the support The overhanging foot section of the foot 413 is higher than the exposed end of the limit screw 414 installed on the metal ...
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The invention provides a five tube-type silicon chip conveying device for a mesh tape-free silicon panel sintering furnace. The conveying device comprises two fixed brackets and three movable brackets, wherein the fixed brackets are identical to the movable brackets in structure; both the fixed brackets and the movable brackets comprise quartz glass tubes, metal sleeves, support pins and stop screws; the support pins are fixed on the metal sleeves; threaded holes are formed on the metal sleeves; and the metal sleeves are fixed on the quartz glass tubes at equal intervals through the stop screws. As the fixed brackets are mounted on two fixed racks, the movable brackets are mounted on two sliding plates, and the sliding plates can finish ascending, moving forwards, descending and backing in sequence under the action of a reciprocating lifting mechanism and a reciprocating translating mechanism, silicon chips on the fixed brackets can pass through a tunnel-type sintering case step by step under the action of the movable brackets to finish sintering smoothly; and the silicon chips are only contacted with the support pins, so that the sintering quality of the silicon chips is improved.
Description
Technical field: [0001] The invention relates to a sintering furnace for silicon battery slices without mesh belts, in particular to a silicon wafer transmission device in the sintering furnace for silicon battery slices without mesh belts. Background technique: [0002] At present, solar cell manufacturers at home and abroad mainly use sintering furnaces produced by European and American companies. The structure of such sintering furnaces are mesh belt tunnel sintering furnaces. Heater lamps with different densities are arranged in different areas to control the temperature of each area. The silicon wafers with printed electrodes are transported through the mesh belt and pass through the different furnace temperature areas of the sintering furnace in turn to complete the preheating process. The electrode sintering process of hot debonding, heating, sintering and cooling, although this mesh belt tunnel sintering technology is relatively mature, but the vertical area of the...
Claims
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IPC IPC(8): H01L21/677H01L31/18
CPCY02P70/50
Inventor 孙铁囤荀建华刘志刚高玉山潘盛姚伟忠陈琼
Owner EGING PHOTOVOLTAIC TECHNOLOGY CO LTD