Method and device for lossless automatic approximation by facing nano observation and nano operation

Abstract

The invention relates to atomic force microscope (AFM)-based atomic force scanning microscope technology and discloses a method and a device for lossless automatic approximation by facing nano observation and nano operation. The method comprises the following steps of: driving a sample platform to rise by controlling a stepper motor; judging whether a sample is moved to a preset position or not by using detection signals of a laser receiver so as to finish the initial setting for approximation; and controlling a piezoelectric ceramic driver to approximate upwards, and judging whether the sample is contacted with a probe or not by detecting a photoelectric sensor so as to finish the final approximation. By the method and the device, the problem that the thickness of the sample influences the approximation process in the sample approximation process is effectively solved, and damages to the probe and the surface of the sample are reduced in the approximation process.

Description

technical field [0001] The present invention relates to a non-destructive automatic approximation method and device in the process of using an AFM (Atomic Force Microscope, atomic force scanning microscope) probe for nanometer observation and operation, specifically a new continuous approximation method and device for realizing nanometer observation and Non-destructive automatic approach of the sample relative to the probe during operation. Solve the damage of probe and sample surface features caused by human misoperation in the traditional AFM approximation process. technical background [0002] At present, AFM-based nano-observation and operation technology plays a very important role in nano-material observation, nano-device manufacturing, nano-science research and nano-processing applications, and has become an important direction in nano-science research. The principle of AFM-based nano observation and operation is to control the cantilever beam structure probe to prod...

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Problems solved by technology

This direct method requires the system to have high precision and stability control and response speed capability, and it is difficult to realize. During the approaching contact process, the sample and the probe are prone to collision, which will damage the probe and make some characteristics of the sample surface Biological samples such as DNA are compromised

Another method using limit switches to achieve lossless approximation, but it has high requirements for the height of the sample, the position of the limit switch needs to be adjusted according to the position of the sample, so there is a certain limit on the height of the sample, and it is not easy to implement Continuous sample non-destructive automatic approximation during operation

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