A method and system for spectrum data analysis

An analysis method, a technique of spectral data, applied in the fields of analyzing materials, material analysis using wave/particle radiation, spectrum investigation, etc., which can solve the problems of difficult tasks and low accuracy of element quantification.

Active Publication Date: 2011-06-01
FEI CO
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Problems solved by technology

The task of analyzing spectra at low counts is more difficult because there is too much variability in the underlying spectrum and the peaks per element are not Gaussian
Therefore, the techniques used by existing methods are not suitable for low-count spectroscopic analysis for mineral identification, as they usually exhibit smooth spectra
[0027] On the other hand, element quantification is less accurate for low count spectra

Method used

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  • A method and system for spectrum data analysis
  • A method and system for spectrum data analysis
  • A method and system for spectrum data analysis

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Embodiment approach

[0147] Figure 48 A scanning electron beam system 200 is shown having an x-ray detector 240 suitable for implementing embodiments of the invention. A scanning electron microscope 241 is provided to the system 200 together with a power supply and control unit 245 . The electron beam 232 is emitted from the cathode 253 by applying a voltage between the cathode 253 and the anode 254 . The electron beam 232 is focused to a fine spot by a condenser lens 256 and an objective lens 258 . The electron beam 232 is scanned across the sample in two dimensions using a deflection coil 260 . The operations of the condenser lens 256 , the objective lens 258 and the deflection coil 260 are controlled by the power supply and control unit 245 .

[0148] The system controller 233 controls the operation of the various components of the scanning electron beam system 200 . The vacuum chamber 210 is evacuated using an ion pump 268 and a mechanical pumping system 269 under the control of a vacuum ...

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Abstract

A method and system for spectrum data analysis. The method comprises the steps of collecting a spectrum of an unknown material; providing a set of element data templates; calculate optical least squares weights for the element data templates in approximating the spectrum; removing one or more of the templates having negative weights in approximating the spectrum; and re-calculating an approximation of the spectrum with said one or more templates removed.

Description

technical field [0001] The present invention generally relates to methods and systems for spectral data analysis. Background technique [0002] In many applications, information about a sample is determined by accumulating radiation from the sample over a period of time. Properties of the radiation, such as its energy profile or its diffraction pattern, can often be correlated to the type of material present in the sample. For example, a sample, when bombarded by electrons, emits characteristic x-rays whose energies are related to the components in the sample. Similarly, crystals produce a characteristic diffraction pattern when bombarded with x-rays, and the spectrum of gamma rays and other rays is used by astronomers to study the composition of the universe. The term "sample" is used herein to broadly include objects being observed. [0003] In one widely used application, scanning electron microscopes can be used to determine the elemental composition of unknown materi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28G01J3/30G01J3/46
CPCG01N23/2076H01J37/28
Inventor D·R·科贝特P·戈特利布M·J·欧文A·H·门兹斯
Owner FEI CO
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