A method and system for spectrum data analysis
An analysis method, a technique of spectral data, applied in the fields of analyzing materials, material analysis using wave/particle radiation, spectrum investigation, etc., which can solve the problems of difficult tasks and low accuracy of element quantification.
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[0147] Figure 48 A scanning electron beam system 200 is shown having an x-ray detector 240 suitable for implementing embodiments of the invention. A scanning electron microscope 241 is provided to the system 200 together with a power supply and control unit 245 . The electron beam 232 is emitted from the cathode 253 by applying a voltage between the cathode 253 and the anode 254 . The electron beam 232 is focused to a fine spot by a condenser lens 256 and an objective lens 258 . The electron beam 232 is scanned across the sample in two dimensions using a deflection coil 260 . The operations of the condenser lens 256 , the objective lens 258 and the deflection coil 260 are controlled by the power supply and control unit 245 .
[0148] The system controller 233 controls the operation of the various components of the scanning electron beam system 200 . The vacuum chamber 210 is evacuated using an ion pump 268 and a mechanical pumping system 269 under the control of a vacuum ...
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