Optical device, electronic equipment, and method of producing same
A technology for optical devices and manufacturing methods, applied in optical components, optics, and electro-solid devices, etc., can solve the problems of reduced light-receiving sensitivity, deterioration of image characteristics, and reduced number of effective pixels, etc. Effect
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no. 1 Embodiment approach
[0051] Below, refer to Figure 1A ~ Figure 1C , the exemplary optical devices 10A and 10B according to the first embodiment of the present invention will be described. in addition, Figure 1A It is a sectional view showing the structure of the optical device 10A according to the first embodiment. Figure 1B It is a sectional view showing the structure of an optical device 10B which is a modified example of the optical device 10A. Figure 1C It is an enlarged view of the concavo-convex portion 16 provided in the optical devices 10A and 10B.
[0052] Such as Figure 1A As shown, the optical device 10A includes: a semiconductor element 11; a light receiving unit 12 on its surface (hereinafter referred to as “principal surface”); a peripheral circuit region 13 that processes, for example, a signal from the light receiving unit 12 around the light receiving unit 12 an electrode region 14 partially formed of a thin metal film such as Al or Cu;
[0053] This optical device 10A i...
no. 2 Embodiment approach
[0079] Below, refer to Figure 2A and Figure 2B , the optical devices 10C and 10D according to the second embodiment of the present invention will be described. in addition, Figure 2A It is a cross-sectional view showing the structure of an optical device 10C according to the second embodiment of the present invention. Figure 2B It is a sectional view showing the structure of an optical device 10D which is a modified example of the optical device 10C.
[0080] Such as Figure 2A and Figure 2B As shown, the optical devices 10C and 10D are different from the optical devices 10A and 10B of the first embodiment in that the sawtooth-shaped concavo-convex portion 16 is formed on the surface of the light-transmitting plate 15 facing the semiconductor element 11 . Therefore, the following description will focus on the differences from the above-mentioned embodiment. Figure 1A ~ Figure 2B In , the same constituent units are given common reference numerals and detailed descri...
no. 3 Embodiment approach
[0092] Below, refer to Figure 3A and Figure 3B , the optical devices 10E and 10F according to the third embodiment of the present invention will be described. in addition, Figure 3A It is a cross-sectional view showing the structure of an optical device 10E according to the third embodiment of the present invention. Figure 3B It is a cross-sectional view showing the structure of an optical device 10F which is a modified example of the optical device 10E.
[0093] Such as Figure 3A and Figure 3B As shown, the optical devices 10E and 10F are different from the optical device 10A of the first embodiment in that not only the upper surface but also the lower surface of the light-transmitting plate 15 are provided with sawtooth-shaped concavo-convex portions 16 . Therefore, the following description will focus on the differences from the above-mentioned embodiments. Figure 1A ~ Figure 3B In , the same constituent units are given common reference numerals and detailed de...
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