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Optical device, electronic equipment, and method of producing same

A technology for optical devices and manufacturing methods, applied in optical components, optics, and electro-solid devices, etc., can solve the problems of reduced light-receiving sensitivity, deterioration of image characteristics, and reduced number of effective pixels, etc. Effect

Inactive Publication Date: 2011-07-27
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0016] However, in the above-described solid-state imaging device 100A, there is a problem that, among the light rays incident on the light-transmitting plate 106, only the light rays incident on the area corresponding to the imaging element 102 (hereinafter referred to as "imaging area") reach the imaging element. 102, and the light incident on the area outside the imaging area (hereinafter referred to as "peripheral area") does not reach the imaging element 102
That is, since the amount of light received by the imaging element 102 is small relative to the amount of light incident on the light-transmitting plate 106, the light-receiving sensitivity of the imaging element 102 becomes low.
[0017] In addition, since the light incident on the peripheral area is also irradiated on the adhesive member 105, the problem of light resistance that degrades the adhesive member 105 occurs depending on the wavelength of the light.
[0018] In addition, there is a problem that image characteristics are degraded by light reflected from the side surface of the light-transmitting plate 106, the surface of the semiconductor element 101 corresponding to the peripheral region, and the surface of the adhesive member 105. The distance between the sides of the plate 106 is designed to be wider to some extent
In addition, it is necessary to make the imaging area narrower, or to make the solid-state imaging device 100A larger (to make the semiconductor element 101 larger, or to make the light-transmitting plate 106 larger than the imaging element 102).
[0019] However, if the imaging area is narrowed, the number of effective pixels decreases and sharp images cannot be obtained
Alternatively, the light-receiving sensitivity is reduced by reducing the size of the microlens 103
On the other hand, when the solid-state imaging device 100A is made larger, there is a problem that the area of ​​the solid-state imaging device 100A becomes larger.

Method used

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  • Optical device, electronic equipment, and method of producing same
  • Optical device, electronic equipment, and method of producing same
  • Optical device, electronic equipment, and method of producing same

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no. 1 Embodiment approach

[0051] Below, refer to Figure 1A ~ Figure 1C , the exemplary optical devices 10A and 10B according to the first embodiment of the present invention will be described. in addition, Figure 1A It is a sectional view showing the structure of the optical device 10A according to the first embodiment. Figure 1B It is a sectional view showing the structure of an optical device 10B which is a modified example of the optical device 10A. Figure 1C It is an enlarged view of the concavo-convex portion 16 provided in the optical devices 10A and 10B.

[0052] Such as Figure 1A As shown, the optical device 10A includes: a semiconductor element 11; a light receiving unit 12 on its surface (hereinafter referred to as “principal surface”); a peripheral circuit region 13 that processes, for example, a signal from the light receiving unit 12 around the light receiving unit 12 an electrode region 14 partially formed of a thin metal film such as Al or Cu;

[0053] This optical device 10A i...

no. 2 Embodiment approach

[0079] Below, refer to Figure 2A and Figure 2B , the optical devices 10C and 10D according to the second embodiment of the present invention will be described. in addition, Figure 2A It is a cross-sectional view showing the structure of an optical device 10C according to the second embodiment of the present invention. Figure 2B It is a sectional view showing the structure of an optical device 10D which is a modified example of the optical device 10C.

[0080] Such as Figure 2A and Figure 2B As shown, the optical devices 10C and 10D are different from the optical devices 10A and 10B of the first embodiment in that the sawtooth-shaped concavo-convex portion 16 is formed on the surface of the light-transmitting plate 15 facing the semiconductor element 11 . Therefore, the following description will focus on the differences from the above-mentioned embodiment. Figure 1A ~ Figure 2B In , the same constituent units are given common reference numerals and detailed descri...

no. 3 Embodiment approach

[0092] Below, refer to Figure 3A and Figure 3B , the optical devices 10E and 10F according to the third embodiment of the present invention will be described. in addition, Figure 3A It is a cross-sectional view showing the structure of an optical device 10E according to the third embodiment of the present invention. Figure 3B It is a cross-sectional view showing the structure of an optical device 10F which is a modified example of the optical device 10E.

[0093] Such as Figure 3A and Figure 3B As shown, the optical devices 10E and 10F are different from the optical device 10A of the first embodiment in that not only the upper surface but also the lower surface of the light-transmitting plate 15 are provided with sawtooth-shaped concavo-convex portions 16 . Therefore, the following description will focus on the differences from the above-mentioned embodiments. Figure 1A ~ Figure 3B In , the same constituent units are given common reference numerals and detailed de...

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Abstract

An optical device (10A) is provided with a semiconductor element (11), a light-receiving part (12) provided on the main surface of the semiconductor element (11), and a translucent sheet (15) stacked on the main surface of the semiconductor element (11) via a bonding member (20). Further, a saw-toothed textured section (16) is formed on at least one of either the surface of the transparent sheet (15) that faces the semiconductor element (11), or the rear surface of the same.

Description

technical field [0001] The present invention relates to optical devices for detecting light and methods of manufacturing the same. Background technique [0002] In recent years, with the development of miniaturization, thinning, weight reduction and high performance of electronic equipment, semiconductor devices have changed from conventional package structures, and bare chip or CSP (Chip Scale Package) structures have become mainstream. Among them, wafer-level CSP technology that enables electrical connection through formation of through-electrodes and rewiring in a wafer state assembly process has attracted attention. For example, this technique is gradually adopted in optical devices typified by solid-state imaging devices (for example, refer to Patent Document 1). [0003] Figure 4 It is a diagram schematically showing a cross-section of a conventional solid-state imaging device 100A having a wafer-level CSP structure. [0004] A conventional solid-state imaging devic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18H01L27/146H04N5/335H01L27/14H04N25/00
CPCG02B27/4205G02B5/1814H01L27/14623G02B5/1842H01L27/14625G02B27/4272H01L27/14685H01L27/14636G02B5/1876H01L27/14621H01L27/14627H01L2224/11
Inventor 井上大辅藤井恭子中野高宏佐野光
Owner PANASONIC CORP
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