Local pressure controllable planar optical element polishing device

Abstract

The invention discloses a local pressure controllable planar optical element polishing device, and relates to an optical element polishing device. The device is provided with a connecting shaft, a base, a sealing cylinder, a magnetorheological device disc, magnetorheological fluid, a rubber film, an embedded control device and a clamping jaw; one end of the connecting shaft is fixed on the upper surface of the base, the lower surface of the base is provided with a clamping jaw fixing groove, and the sealing cylinder is fixed on the lower surface of the base; the magnetorheological device disc, the magnetorheological fluid and the rubber film are arranged in the sealing cylinder; a regional magnetic field adjusting device is fixed in the magnetorheological device disc; the bottom center of the magnetorheological device disc is provided with a small hole, and the small hole is connected with a lead through hole in the center of the base; a lead of a connecting coil in the regional magnetic field adjusting device and a micro motor power wire pass through the small hole and the lead through hole on the base and are connected with the embedded control device; and a layer of magnetorheological fluid is sealed between the magnetorheological device disc and the rubber film at the bottom of the sealing cylinder. The device can realize quick convergence of surface shape error of a workpiece.

Description

technical field [0001] The invention relates to an optical element polishing device, in particular to a large-diameter flat optical element polishing device with controllable local pressure. Background technique [0002] The continuous development of modern science and technology requires more and more ultra-precision surfaces. The so-called high-precision surfaces usually refer to surfaces with an accuracy of 0.3-0.03 μm, and the corresponding processing technology is called high-precision surface processing technology. At present, many large-scale systems require a large number of large-caliber high-precision planar optical components, which require this type of technology for processing. Polishing is a very important technology in the processing of large-diameter and high-precision planar optical components, but there are still some problems in it, such as too much dependence on the operator's experience, low processing efficiency, unstable processing quality, etc. . Ho...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a controllable local pressure that can realize the rapid convergence of the surface shape error of the workpiece in view of the unevenness of the workpiece surface during the polishing process of large-diameter optical elements and the sudden change in the edge stress of the workpiece during the polishing process that affects the final machining accuracy. Polishing device for flat optical components

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