Method for measuring coaxial error of thru-beams
A measurement method and beam technology, applied in the field of optical systems, can solve problems such as large residual angle error, difficult judgment, and inability to meet precision requirements
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Embodiment 2
[0041] In embodiment 2, for non-polarized light, the measurement optical path is simpler, only need to change the polarizing beam splitting prism into a beam splitting prism, and remove the quarter wave plate at the same time.
[0042] The method for measuring the coaxial error of the beam of light includes the following steps:
[0043] 1. The two pairs of beams to be measured are respectively called the first beam and the second beam, and a beam splitting prism 5 is inserted in the optical path of the two pairs of beams, so that the beam splitting surface of the beam splitting prism 5 and the The beam is at 45°;
[0044] ②In the direction of the reflected light of the second light beam of the beam splitting prism 5, a corner reflector 2 and a light intensity detector 1 are arranged in sequence, the corner reflector 2 is placed on the two-dimensional translation adjustment frame 3 and the corner reflector 2 The hypotenuse is perpendicular to the reflected light beam, and the ...
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