Method for measuring coaxial error of thru-beams
A measurement method and beam technology, applied in the field of optical systems, can solve problems such as large residual angle error, difficult judgment, and inability to meet precision requirements
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[0041] In Embodiment 2, for non-polarized light, the measurement optical path is simpler, only the polarization beam splitting prism is changed to a beam splitting prism, and the quarter wave plate is removed at the same time.
[0042] The method for measuring the coaxial error of the opposite beam includes the following steps:
[0043] ① The two pairs of beams to be tested are called the first beam and the second beam, respectively. A beam splitting prism 5 is inserted into the optical path of the two pairs of beams to make the beam splitting surface of the beam splitting prism 5 and the The beam is at 45°;
[0044] ② In the reflected light direction of the second beam of the beam splitting prism 5, a corner reflector 2 and a light intensity detector 1 are arranged in sequence. The corner reflector 2 is placed on the two-dimensional translation adjustment frame 3 and the corner reflector 2 The hypotenuse of the corner reflector 2 is perpendicular to the reflected light beam, and th...
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