Coating device and coating method
A technology of a coating device and a coating chamber, which is applied in the directions of sputtering coating, ion implantation coating, vacuum evaporation coating, etc., can solve problems such as low production efficiency, damage to the coating target material, and unfavorable coating quality, so as to save the need for repeated The process of vacuuming, improving the coating efficiency and avoiding the effect of vacuum environment
Inactive Publication Date: 2011-11-09
东莞市华欧泰电子科技有限公司
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Problems solved by technology
In this way, in the multi-batch production process, not only need to vacuumize many times, resulting in low production efficiency, but also may damage the coating target material, which is not conducive to improving the coating quality
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[0056] The film coating device provided by the technical solution will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0057] Please also refer to Figure 1 to Figure 4 , The technical solution provides a coating device 10, which includes a transition chamber 11, a coating chamber 12, a valve 13, a plurality of material rods 14, a first material rack 15, a second material rack 16 and a material rod transfer device 17.
[0058] The transition cavity 11 may be cylindrical, and includes a top wall, a side wall and a bottom wall connected in sequence. A first opening 111 is defined on the side wall. In this embodiment, the transition cavity 11 is made of transparent material.
[0059] The coating chamber 12 is adjacent to the transition chamber 11 . The coating chamber 12 is also cylindrical, and it also includes a top wall, a side wall and a bottom wall that are sequentially connected. A second opening 121 is defined on th...
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The invention relates to a coating device. The coating device comprises a transition cavity, a coating cavity, a valve, a plurality of material rods, a first material rack, a second material rack and a material rod transferring device, wherein the material rod transferring device is arranged in the transition cavity; the valve is connected between the transition cavity and the coating cavity, is used for communicating the transition cavity with the coating cavity when opened and is used for isolating the transition cavity from the coating cavity when closed; the first material rack and the second material rack are used for arranging the plurality of material rods; the material rod transferring device comprises a driving mechanism, a clamping jaw and a baffle plate; the clamping jaw is used for transferring the plurality of material rods from the first material rack to the second material rack one by one or is used for transferring the plurality of material rods from the second material rack to the first material rack one by one; and the baffle plate is arranged on the driving mechanism, is close to the clamping jaw and is used for removing workpieces which fall off the material rods from the valve in the transferring process. According to the technical scheme, the invention also provides a coating method.
Description
technical field [0001] The invention relates to the field of coating, in particular to a coating device capable of protecting a coating target and improving coating efficiency and a coating method using the coating device. Background technique [0002] Coating technology is a novel material synthesis and processing technology, and is an important part of the surface engineering technology field. Coating technology is to use physical and chemical means to coat a thin film with special properties on the solid surface, so that the solid surface has many advantages such as wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic permeability or insulation. Performance, so as to improve product quality, prolong product life, save energy and obtain significant technical and economic benefits. Sputtering is a kind of coating technology, which uses ions generated by glow discharge to hit the ta...
Claims
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Inventor 王仲培
Owner 东莞市华欧泰电子科技有限公司