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Organic compound steam generator and apparatus for producing organic thin film

A steam generating device and a technology for organic compounds, which are applied in lighting devices, vacuum evaporation coating, devices for coating liquids on surfaces, etc., and can solve problems such as backflow of organic material steam.

Active Publication Date: 2013-10-30
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] In the conventional steam generator 130, there is a problem that the organic material steam generated in the generating tank 133 flows back into the tubular insertion part 128.

Method used

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  • Organic compound steam generator and apparatus for producing organic thin film
  • Organic compound steam generator and apparatus for producing organic thin film
  • Organic compound steam generator and apparatus for producing organic thin film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0057] figure 1 Reference numeral 1 is an organic thin film production device (vapor deposition device) according to an example of the present invention.

[0058] This organic thin film manufacturing apparatus 1 has a film forming tank 10 , a steam generating device 30 , and a steam releasing device 50 .

[0059] The steam releasing device 50 is arranged inside the film forming tank 10 . The steam generator 30 is connected to the steam release device 50 via the connection valve 20 , and when the connection valve 20 is turned on, the steam of the organic compound generated in the steam generator 30 is supplied to the steam release device 50 . The organic compound vapor supplied to the vapor releasing device 50 is released from a plurality of releasing ports 51 of the vapor releasing device 50 into the film forming tank 10 in a vacuum environment.

[0060] figure 2The shown steam generator 30 is an example of the present invention, and has a storage tank 31 , a transport de...

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PUM

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Abstract

A technique is provided in which organic compound vapor generated in a generator tank does not flow back into an inner connecting pipe that supplies the organic compound to the generator tank. It has a storage tank (31) for arranging organic materials, a generator tank (33) for heating organic materials to generate steam of organic materials, and a conveying device for supplying organic materials in the storage tank (31) to the generator tank (33). In the organic thin film manufacturing device (1) of (32), the conveying device (32) is provided with: an outer connecting pipe (37), which airtightly connects the internal environment of the storage tank (31) and the internal environment of the generating tank (33) The gas inlet (42) introduces the gas into the inner connecting pipe made of quartz which is arranged inside the outer connecting pipe (37) to make the organic material move from the inside of the storage tank (31) to the inside of the generating tank (33) (38) inside.

Description

technical field [0001] The present invention relates to an evaporation source for manufacturing organic EL and an organic EL manufacturing device. Background technique [0002] image 3 The shown conventional steam generator 130 has a storage tank 131 , a transport device 132 , and a generator tank 133 . [0003] Inside the storage tank 131, a funnel-shaped funnel container 134 is arranged vertically. The funnel container 134 has an inverted conical funnel slope 129 and a tubular insertion portion 128 as a tube connected to a hole at the center of the funnel shape. The tubular insertion portion 128 extends vertically downward, and the metering rod 135 is inserted vertically from a position above the upper end of the tubular insertion portion 128 to the inside of the tubular insertion portion 128 . [0004] A generation tank 133 is disposed below the storage tank 131 , and the conveying device 132 is disposed between the storage tank 131 and the generation tank 133 . [00...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C16/448H01L51/50H05B33/10
CPCB05D1/60C23C14/12C23C14/228C23C14/243C23C14/246H10K71/164C23C14/24
Inventor 根岸敏夫平岩秀行
Owner ULVAC INC