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Scanning probe microscope body with isolated imaging scanning and rough approximation

An imaging scanning and scanning probe technology, applied in the field of scanning probe microscopy, can solve the problems of unstable and unstable relative position between the probe and the sample, and achieve the effects of improving accuracy and resolution, reducing noise and reducing costs.

Inactive Publication Date: 2011-11-16
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The object of the present invention is to provide a scanning probe microscope body in which imaging scanning and rough approximation are separated, so as to solve the problem that the instability of the rough approximation positioner in the scanning probe microscope in the prior art will cause the relative position between the probe and the sample to be inconsistent. stability problem

Method used

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  • Scanning probe microscope body with isolated imaging scanning and rough approximation
  • Scanning probe microscope body with isolated imaging scanning and rough approximation
  • Scanning probe microscope body with isolated imaging scanning and rough approximation

Examples

Experimental program
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Effect test

Embodiment 1

[0024] Example 1: Rough Approximation Imaging Scanning and Rough Approximation Isolated Scanning Probe Microscope Mirror Body under Gravity

[0025] See attached figure 1 In this embodiment, rough approximation imaging scanning under gravity and a scanning probe microscope mirror body isolated from coarse approximation include XYZ piezoelectric positioner 5, X piezoelectric positioner 2, XYZ piezoelectric positioner frame 4, and X piezoelectric positioner Holder 1, sample rack 3, X piezoelectric positioner 2 is fixed between sample rack 3 and X piezoelectric positioner seat 1, XYZ piezoelectric positioner 5 is fixed on XYZ piezoelectric positioner frame 4, X piezoelectric positioner The positioning direction of the positioner 2 is perpendicular to the direction of gravity, and the XYZ piezoelectric positioner frame 4 is pressed on the sample holder 3 by gravity and is free in the positioning direction of the X piezoelectric positioner 2 .

[0026] The working principle of thi...

Embodiment 2

[0027] Example 2: Tangential Piezoelectric Stack-Driven Imaging Scanning and Coarse Approximation Isolated Scanning Probe Microscope Mirror Body

[0028] In the above-mentioned embodiment 1, the X piezoelectric positioner 2 may be a tangential piezoelectric stack (shear piezo stack), so that the tangential piezoelectric stack is vertically stacked with its tangential piezoelectric sheets (shear piezo plates) When fixed on the X piezoelectric locator seat 1, the positioning direction of its top is horizontal, that is, perpendicular to the direction of gravity, so that the XYZ piezoelectric locator frame 4 together with the XYZ piezoelectric locator fixed on it can be driven in the horizontal direction. The positioner 5 is thrown towards the sample 7 fixed on the sample holder 3 step by step in an inertial step, so as to realize a rough approach. The purpose of using a tangential piezoelectric stack here is to increase thrust and reduce drive low voltage.

Embodiment 3

[0029] Example 3: Scanning Probe Microscope Mirror Body with Guided Imaging Scanning and Coarse Approximation Isolation

[0030] In the above-mentioned embodiments 1 and 2, a guide rail along the positioning direction of the X piezoelectric positioner 2 is provided between the XYZ piezoelectric positioner frame 4 and the sample frame 3 . Its purpose is to make the X piezoelectric positioner 2 slide on the guide rail when driving the XYZ piezoelectric positioner frame 4 to inertially step on the sample holder 3. On the one hand, the friction coefficient between the sliding surfaces can be improved. Small is more stable, slip is easier and more reliable, and on the other hand makes inertia stepping (coarse approximation) a more directional move.

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Abstract

The invention discloses a scanning probe microscope body with isolated imaging scanning and rough approximation, comprising an XYZ piezoelectric locator, an X piezoelectric locator, an XYZ piezoelectric locator frame, an X piezoelectric locator holder, and a sample frame. The scanning probe microscope body is characterized in that the X piezoelectric locator is fixed between the sample frame and the X piezoelectric locator holder; the XYZ piezoelectric locator is fixed on the XYZ piezoelectric locator frame; the location direction of the X piezoelectric locator is vertical to the gravity direction; and the XYZ piezoelectric locator frame is pressed on the sample frame by a gravity and is free in the location direction of the X piezoelectric locator. The microscope body disclosed by the invention can solve the problem of instable relative position between a probe and a sample due to an instable rough approximation locator in a scanning probe microscope, and is good for realizing a scanning probe microscope body controlled by a fully-low voltage (lower than 15 V of power supply voltage of the industrial standard), thereby decreasing the noise, drift and leakage current of the circuit, increasing the measurement precision and resolution ratio, and simultaneously decreasing the cost.

Description

technical field [0001] The invention relates to the technical field of scanning probe microscopes, in particular to scanning probe microscopes, in particular to a scanning probe microscope mirror body that isolates imaging scanning and coarse approximation. Background technique [0002] Scanning probe microscope (SPM for short) has become a key tool in major strategic scientific and technological fields such as nanotechnology, quantum control, molecular biology, material science and surface chemistry due to its extremely high spatial resolution, especially some of its Important members, such as scanning tunneling microscope (STM for short) and atomic force microscope (AFM for short), have atomic or even subatomic resolution. So far, its stability and resolution are still not very satisfactory, because it is difficult to achieve long-term stability and accuracy by controlling the atomic-level positioning with a macroscopic lens. How to further improve, or even breakthrough i...

Claims

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Application Information

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IPC IPC(8): G01Q60/00G01Q60/10G01Q60/38
Inventor 陈旭
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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