Unlock instant, AI-driven research and patent intelligence for your innovation.

Micro-electro-mechanical system circuit and the method for controlling the same

A micro-electro-mechanical system and circuit technology, applied in the direction of electrical program control, circuits, electrical components, etc., can solve the problems of high power consumption and the inability to take into account the micro-electro-mechanical system, etc., and achieve the effect of eliminating the variation of the moving distance

Active Publication Date: 2014-07-16
TAIWAN SEMICON MFG CO LTD
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the charging pump supplies the MEMS with a high voltage of 15-20V in different ways, it will generate a high voltage that cannot meet the voltage requirements of the MEMS, which will cause additional high power consumption

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro-electro-mechanical system circuit and the method for controlling the same
  • Micro-electro-mechanical system circuit and the method for controlling the same
  • Micro-electro-mechanical system circuit and the method for controlling the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as: up, down, left, right, front or back, etc., are only directions referring to the attached drawings. Accordingly, the directional terms are used to illustrate and not to limit the invention.

[0037] According to the above method of controlling the MEMS circuit, the operating voltage of the MEMS circuit of the present invention is controlled according to the moving distance of the mechanical element, so it consumes less power than other methods. Furthermore, because the above-mentioned operating voltage is controlled, the variation of the moving distance of mechanical components caused by PVT and Q factors is also eliminated.

[0038] figure 1 is a functional block diagram of an...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A MEMS circuit and a method of controlling the MEMS circuit, the method comprising generating a current according to movement of a MEMS device, wherein the movement is controlled by a control signal; generating a peak voltage according to the current; and The control signal is adjusted when the peak voltage exceeds a predetermined range. The operating voltage of the MEMS circuit of the present invention is controlled according to the moving distance of the mechanical element, so it consumes less power than other methods. Furthermore, because the above-mentioned operating voltage is controlled, the variation of the moving distance of the mechanical element caused by PVT and Q factor is also eliminated.

Description

technical field [0001] The present invention relates to microelectromechanical systems (MEMS) circuits. Background technique [0002] MEMS circuits are widely used in many applications, such as gyroscopes and oscillators, etc. However, oscillations in MEMS applications are dependent on the mass production process, voltage and temperature variation (PVT). The quality factor Q in MEMS, defined as the ratio of the energy stored in the resonator to the energy lost in one cycle, also changes accordingly. This can cause each MEMS to react differently when a fixed voltage is connected to it, such as one device moving a longer distance than another. When the charging pump supplies the MEMS with a high voltage of 15-20V in different ways, it will generate a high voltage that cannot meet the voltage requirements of the MEMS, which will cause additional high power consumption. Therefore, there is a need to improve the above-mentioned shortcomings of MEMS and related applications. ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/02B81B7/00
CPCH03B5/30
Inventor 黄明杰普强荣陈建宏林志昌隋彧文
Owner TAIWAN SEMICON MFG CO LTD