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Assembly type rotating target apparatus facilitating changing of target materials

A component type, rotating target technology, applied in the field of easy-change target component type rotating target device, can solve the problems of target component replacement, affect processing effect and service life, target installation position gap, etc., to improve service life Effect

Inactive Publication Date: 2011-12-07
黄峰
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the existing device has a fixed spacing and cannot adapt to the replacement of target components of different types and lengths. At the same time, it will cause gaps in the target installation position, which will affect the processing effect and service life.

Method used

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  • Assembly type rotating target apparatus facilitating changing of target materials
  • Assembly type rotating target apparatus facilitating changing of target materials

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0012] Such as figure 1 The shown rotating target device of easy-change target assembly 5 includes a processing box 1, and a bottom plate 2 is arranged at the bottom of the processing box 1. Terminal assembly 3. Correspondingly, a hydropower terminal assembly 4 is installed on the other side of the bottom plate 2 . A target assembly 5 is installed in the working connecting end of the driving end assembly 3 and the hydropower end assembly 4 .

[0013] In view of a preferred embodiment of the present invention, in order to adapt to different lengths and types of target assemblies 5, it can be stably installed in the working connection end of the drive end assembly 3 and the hydropower end assembly 4, at the drive end The working connection ends of the component 3 and the hydropower terminal component 4 are all provided with telescopic shaft retaining rings 6 . In this way, in actual use, the telescopic length of the telescopic retaining ring 6 for the shaft can be adjusted to...

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PUM

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Abstract

The invention relates to an assembly type rotating target apparatus facilitating changing of target materials. The apparatus comprises a processing casing, the bottom of which is provided with a base plate; and the apparatus is characterized in that: one side of the base plate is provided with a driving end assembly, the other side of the base plate is provided with a water power end assembly, and a target material assembly is arranged in operating cohesive ends of the driving end assembly and the water power end assembly. Existence of a back-up ring of a telescopic shaft enables effective control of installation spacing of the target material assembly located between the driving end assembly and the water power end assembly. Therefore, the apparatus can effectively adapt to installation of different target material assemblies with various specifications, and enables the target material assemblies to be installed well to position and to have a prolonged service life through spacing adjustment.

Description

technical field [0001] The invention relates to a rotating target device, in particular to an easily replaceable target component type rotating target device. Background technique [0002] At present, most of the equipment for producing coated glass adopts planar sputtering cathode target. Its working principle is: the glass to be coated is sent into the vacuum coating chamber, and a certain amount of high-purity process gas such as oxygen, nitrogen or Argon gas, under the action of electromagnetic field and free electrons, the process gas forms positively charged plasma. Under the attraction of the cathode carrying high negative voltage, the plasma bombards the fixed installation according to a certain trajectory and intensity under the control of the magnetic field. The coating material on the planar cathode target in the vacuum coating chamber is collided by gas molecules and deposited on the glass in a certain direction to form a film with a certain thickness. [0003] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34
Inventor 黄峰
Owner 黄峰
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