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Display device with mems light valve and method of forming the same

一种显示装置、光阀的技术，应用在由可变形的元件组成的微观结构装置、微观结构装置、光学等方向，能够解决MEMS光阀灵敏度低等问题

Active Publication Date: 2011-12-14
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The problem solved by the present invention is that the sensitivity of the MEMS light valve in the display device of the prior art is low

Method used

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  • Display device with mems light valve and method of forming the same
  • Display device with mems light valve and method of forming the same
  • Display device with mems light valve and method of forming the same

Examples

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Embodiment Construction

[0108] In order to enable those skilled in the art to better understand the present invention, a display device according to a specific embodiment of the present invention will be described in detail below in conjunction with specific embodiments.

[0109] Figure 1a It is a three-dimensional structure diagram of a MEMS light valve according to a specific embodiment of the present invention; Figure 1b A display device with a MEMS light valve according to a specific embodiment of the present invention along Figure 1a The schematic diagram of the cross-sectional structure in the a-a direction shown. combined reference Figure 1a and Figure 1b The display device according to the specific embodiment of the present invention includes: a substrate 40; a fixed grating 30 located on the substrate 40, and a MEMS light valve 100, and the MEMS light valve 100 is used to control the opening and closing of the fixed grating 30; The MEMS light valve 100 includes: a first light valve 10 ...

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Abstract

The invention discloses a display device provided with a micro-electromechanical system (MEMS) light valve and a forming method thereof. The display device comprises a substrate as well as a fixed grating and the MEMS light valve which are positioned on the substrate, wherein the MEMS light valve is used for controlling the open and closure of the fixed grating, comprises a first light valve and a second light valve, and controls the open and closure of the fixed grating by controlling the movement of the first light valve and the second light valve; and the moving directions of the first light valve and the second light valve are opposite. The display device can be used for improving the sensitivity of the MEMS light valve.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a display device with a MEMS light valve and a forming method thereof. Background technique [0002] In recent years, with the rapid development of the information and communication field, there is an increasing demand for various types of display devices. The current mainstream display devices mainly include: Cathode Ray Tube Display (CRT), Liquid Crystal Display (LCD), Plasma Display (PDP), Electroluminescent Display (ELD) and Vacuum Fluorescent Display (VFD). Due to the advantages of lightness, thinness, small footprint, low power consumption, and low radiation, liquid crystal display devices are widely used in various data processing equipment, such as televisions, notebook computers, mobile phones, and personal digital assistants. [0003] The liquid crystal display device mainly includes: a substrate, in which a backlight source is provided; pixel electrodes are located o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/02G09G3/34
CPCG02B26/02G09G3/3433H01L29/66742G02B26/04H04M1/00G09G3/34G02B26/0841B81B3/00
Inventor 毛剑宏唐德明
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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