Position control apparatus of flexible bilateral driving device, and setting method of relative parameters
A bilateral drive and control device technology, which is applied in the direction of using feedback control, photolithography exposure device, microlithography exposure equipment, etc., to achieve the effect of improving nonlinear damping adjustment, reducing stabilization time, and improving synchronization ability
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[0040] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific examples, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.
[0041] In the present invention, it relates to a control device for a structural system containing a flexible body. Here, the flexible body structure system will be explained firstly. The present invention mainly solves the problems caused by the system of the flexible bilateral drive equipment, for example, the bilateral synchronous control driven by two longitudinal linear motors. In bilateral drive control, the outputs of two sets of servo sy...
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