The invention relates to an
impurity detection
system for high-purity gas and a detection control method thereof, and the
impurity detection
system for the high-purity gas comprises a detection path selection module, a
busbar sample introduction module, a
chromatography pretreatment module and a
moisture detection pretreatment module, the detection path selection module is connected with confluence path units contained in the
busbar sample introduction module, the
chromatography pretreatment module comprises a plurality of
chromatography pretreatment units, the confluence path units are respectively connected with the corresponding chromatography pretreatment units, each confluence path unit is connected with the
moisture detection pretreatment module, and the
moisture detection pretreatment module is connected with the detection path selection module. The detection path selection module is used for acquiring storage information in a high-purity gas
storage tank, and performing corresponding chromatographic analysis steps and / or moisture detection analysis steps on the high-purity gas according to the storage information; the opportunity and parameters of gas entering the detection equipment are automatically adjusted according to the storage states of different steel cylinders, so that the accuracy of a detection result is improved.