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solid state imaging device

A technology of solid-state imaging device and pixel part, which is applied to electric solid-state devices, radiation control devices, semiconductor devices, etc., can solve the problems of color mixing or dispersion, leakage and diffusion, etc., and achieve the effect of suppressing color mixing or dispersion.

Active Publication Date: 2011-12-14
PANASONIC CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, if the long-wavelength light (red light) incident on the substrate 201 from an oblique direction enters the laterally expanded region at the bottom of the photoelectric conversion portion 101, part of the photoelectrically converted charges leaks and diffuses to adjacent pixels. Section 100, color mixing or scatter may occur

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Embodiment Construction

[0042] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the present invention is not limited to the following embodiments. In addition, the present invention can be appropriately changed without departing from the range in which the effects of the present invention are obtained.

[0043] The solid-state imaging device of the present invention is a MOS-type solid-state imaging device in which a plurality of pixel units are arranged in an array, and its basic circuit configuration and Figure 6 The configuration shown is the same.

[0044] figure 1 It is a plan view showing the layout of pixel units 10 arranged in an array (2×2) in one embodiment of the present invention. in addition, figure 2 (a) means along figure 1 The profile of the line IIa-IIa in, figure 2 (b) means along figure 1 Sectional view of line IIb-IIb in.

[0045] Such as figure 1 as well as figure 2As shown in (a) and (b), ...

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Abstract

Pixel units (10) arranged in an array are each provided with: a photodiode (11), a transfer transistor (13) which transfers a charge to a floating diffusion layer (12), and an amplifier transistor (14) which outputs the transferred charge to an output line. An insulating isolation section (22) separates adjacent photodiodes (11) from each other and separates the photodiode (11) and the amplifier transistor (14). The insulating isolation section (22) comprises a first area (A) where the amplifier transistor (14) is not arranged between the photodiodes (11), and a second area (B) where the amplifier transistor (14) is arranged in between. Below the insulating isolation section (22), a first isolation diffusion layer (23) and second isolation diffusion layer (24) are formed, and at the first area (A), the width of the second isolation diffusion layer (24) is wider than the width of the first isolation diffusion layer (23).

Description

technical field [0001] The present invention relates to a solid-state imaging device in which pixel units including photoelectric conversion units are arranged in an array. Background technique [0002] In recent years, MOS-type solid-state imaging devices have attracted attention as devices capable of driving with low power consumption and high-speed imaging, and have begun to be installed in a wide range of fields such as portable cameras, vehicle-mounted cameras, and surveillance cameras. [0003] Figure 6 It is a circuit diagram showing the configuration of a general MOS type solid-state imaging device. Such as Figure 6 As shown, pixel units 100 including photoelectric conversion units (photodiodes) 101 are arranged in an array to form an imaging region 200 . Charges photoelectrically converted in the photoelectric conversion unit 101 are transferred to a floating diffusion layer (floating diffusion) 102 through a transfer transistor 103 . The charge transferred to t...

Claims

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Application Information

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IPC IPC(8): H01L27/146H01L21/265
CPCH01L27/1463H01L21/266H01L27/14609H01L27/14689
Inventor 森三佳冲野彻大竹悠介藤原一夫
Owner PANASONIC CORP
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