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Multifunctional substrate frame for vacuum coating equipment

A technology of vacuum coating and substrate holder, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, to achieve the effect of simple installation and easy cleaning

Inactive Publication Date: 2012-01-25
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above problems not only exist in the coating process of optical thin films, but also in other vacuum coatings.

Method used

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  • Multifunctional substrate frame for vacuum coating equipment
  • Multifunctional substrate frame for vacuum coating equipment
  • Multifunctional substrate frame for vacuum coating equipment

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Embodiment Construction

[0014] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0015] In the field of surface engineering technology, physical vapor deposition is a relatively mature technology, mainly including various deposition methods such as magnetron sputtering, ion beam sputtering, arc ion plating, and electron gun evaporation. In these methods of deposition equipment, generally A special deposition substrate installation mechanism is required, and in the field of coating, we call it a substrate frame. At present, the common substrate frames on deposition equipment are mainly circular metal structures. In order to meet different shapes of coating substrates, in the actual coating process, a certain number of holes of the same size as the substrate are often processed on a stainless steel plate of a certain size, and then the substrate to be coated is placed into the holes on the stainless steel plate middle. Th...

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Abstract

The invention discloses a multifunctional substrate frame for vacuum coating equipment, which comprises a mounting disk and at least two mounting bars, wherein two long strip sliding chutes are arranged on the mounting disk in parallel; the mounting bars are provided with two mounting holes; and the central distance between the two mounting holes is the same as that between the two sliding chutes. According to the substrate frame disclosed by the invention, the mounting requirements on coating an optical thin film in the vacuum coating and coating substrates with different sizes and shapes in other vacuum coating equipment can be met. The invention has the beneficial effects that the waste of designing and processing the substrate frame in the vacuum coating can be greatly reduced, the research periods of different products are shortened, and the like, and batch coating can be realized.

Description

technical field [0001] The invention belongs to the technical field of manufacturing accessories of vacuum coating equipment, and relates to a substrate frame, in particular to a multifunctional substrate frame for vacuum coating equipment. Background technique [0002] There are one or more substrate mounts in the vacuum coating equipment, which are used to fix the substrates to be coated. Optical thin film is a product in vacuum coating. The equipment for coating optical thin film is relatively larger than other vacuum coating equipment, and the shape and number of substrate holders are larger. In the process of coating optical films, it is necessary to design the substrate frame according to the shape and size of the substrate to meet the coating requirements. However, in the actual development and production of optical films, different users have different requirements for the shape, The requirements for thickness and other dimensions are not the same, which requires th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C16/458
Inventor 王济洲熊玉卿王多书陈焘董茂进王超李晨张玲
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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