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Nitrogen-containing germanium carbon alloy membrane material and preparation method thereof

An alloy film and germanium carbon technology, which is applied in the field of film materials and their preparation for improving the hardness and optical band gap of germanium carbon alloy films, can solve the problems of narrow optical band gap, influence on thermal imaging effect, low light absorption, etc. And the effects of good and stable mechanical properties, good application prospects and simple preparation methods

Inactive Publication Date: 2014-12-10
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The ideal infrared anti-reflection protective film material needs to meet multiple property indicators at the same time, including: (1) infrared transparency, wide optical band gap; (2) small stress, good combination with the substrate, easy to plate thick, high hardness, and this Difficult to achieve with most thin film materials
[0004] Germanium-carbon alloy film has become a promising infrared anti-reflection protective film material due to its advantages of infrared transparency, low light absorption, low stress, easy plating thickness, and good combination with most infrared optical materials, but it has low hardness ( About 6GPa), the optical bandgap is narrow (about 1.16eV) two shortcomings
The low hardness makes it difficult for the germanium-carbon alloy film to resist the impact of high-speed raindrops and sandstones, and the narrow band gap makes it work in a narrow band, especially at high temperatures with large light absorption and high thermal emissivity, which seriously affects the thermal imaging effect
These two shortcomings together make it difficult for germanium-carbon alloy film to be used under high-speed flight service conditions, so it is necessary to improve the hardness and optical bandgap of germanium-carbon alloy film

Method used

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  • Nitrogen-containing germanium carbon alloy membrane material and preparation method thereof
  • Nitrogen-containing germanium carbon alloy membrane material and preparation method thereof
  • Nitrogen-containing germanium carbon alloy membrane material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Adjust the distance between the target and the substrate to be 8±0.5cm; pump the vacuum chamber of the deposition system to 2×10 with mechanical pump and molecular pump respectively -3 Below Pa, discharge gas N 2 、CH 4 , Ar is sent from the bottom of the vacuum chamber, and the three gases are mixed into the vacuum reaction chamber by a gas regulating valve and each mass flow meter at a certain ratio. A vacuum pump is connected below the reaction chamber system to control the pressure of the reaction chamber at 0.7 ~1.0Pa.

[0025] Before formal deposition, pre-sputter the Ge target with pure Ar for 5 to 15 minutes to remove residual pollutants on the target. When formally deposited, N 2 、CH 4 , Ar three-way gases are introduced into the reaction vacuum chamber at the same time, and the positive ions generated by their ionization bombard the Ge target upward under the action of the electric field, and the sputtered Ge particles are combined with N 2 、CH 4 The plas...

Embodiment 2

[0038] The preparation process is the same as in Example 1.

[0039] The preparation conditions are as follows.

[0040] Target material: single crystal Ge(111);

[0041] Discharge gas: Ar (99.99%), CH 4 (99.99%) and N 2 (99.99%);

[0042] Single crystal Si substrate temperature: 200°C, or hot-pressed ZnS substrate;

[0043] RF power: 150W;

[0044] Substrate bias: floating potential (Floating);

[0045] Ar and CH 4 The flows are 38.3SCCM and 4.8SCCM respectively, and the flow ratio is 8;

[0046] N 2 Flow: 18SCCM;

[0047] The sputtering time was 20 minutes.

[0048] Test Results:

[0049] A nitrogen-containing germanium-carbon alloy film (such as figure 1), the film thickness is 824nm, and the stress is 0.667GPa, which is lower than the stress (1.106GPa) of the nitrogen-free germanium-carbon alloy film, indicating that the nitrogen-containing germanium-carbon alloy film is more stable. The hardness and the optical bandgap of nitrogen-containing germanium-carbon ...

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Abstract

The invention relates to a nitrogen-containing germanium carbon alloy membrane material and a preparation method thereof, and belongs to the technical field of membrane materials. The alloy membrane material consists of the following components in percentage by atom: 81 percent of germanium, 11 to 9 percent of carbon and 8 to 10 percent of nitrogen. A nitrogen-containing germanium carbon alloy membrane is prepared by a radio frequency magnetic control sputtering method, namely a Ge target is subjected to pre-sputtering through Ar by using monocrystalline germanium as a target and N2, CH4 and the Ar as discharging gases to remove residual pollutants; and the discharging gases are mixed to enter a vacuum reaction chamber, and are sputtered to form the membrane by controlling pressure intensity, the temperature of a substrate and radio frequency power. The nitrogen-containing germanium carbon alloy membrane has a compact structure and a smooth surface, and has the advantages of low stress, simplicity in plating thickness, infrared transparence of a nitrogen-free germanium carbon alloy membrane; and the hardness and the optical band gap of the nitrogen-containing germanium carbon alloy membrane are over 50 percent and 12 percent higher than those of the nitrogen-free germanium carbon alloy membrane, so the nitrogen-containing germanium carbon alloy membrane material is more suitable to be used as an infrared anti-reflection protective membrane material under the condition of high-speed flight service.

Description

technical field [0001] The invention belongs to the technical field of thin film materials, and relates to a film material for improving the hardness and optical band gap of a germanium-carbon alloy film and a preparation method thereof. Background technique [0002] With the development of modern military and space technology, people have higher and higher requirements for the performance of infrared optical materials. Take the infrared optical materials used as windows and fairings of high-speed aircraft as an example. On the one hand, in order to achieve precise tracking and strikes, high transmittance of infrared optical materials is required; High) makes the service conditions of infrared optical materials harsh, which in turn requires infrared optical materials to be resistant to high temperature, wear, raindrops and sand and dust. Unfortunately, far-infrared optical materials commonly used at present, such as ZnS and ZnSe, cannot meet the above requirements at the sa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C22C28/00C23C14/35C23C14/14
Inventor 胡超权郑伟涛孟芳芳
Owner JILIN UNIV
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