Low-dust fall vacuum magneto-controlled sputter coating equipment
A technology of vacuum magnetron sputtering and coating equipment, which is applied in the direction of sputtering coating, vacuum evaporation coating, ion implantation coating, etc., which can solve problems such as unstable product quality, decreased production efficiency, and coating waste products, and achieve increased The effect of contact area and adsorption force, reducing the probability of dust falling, and improving the yield of coating film
Inactive Publication Date: 2012-04-11
林嘉宏
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Problems solved by technology
[0002] At present, the magnetron sputtering equipment used for large-area glass coating on the market adopts a horizontal production line. In this operation, a large number of ions that have not been sputtered to the substrate are adsorbed on the shielding plate or the cathode cover plate, and loose accumulation will be formed for a long time. Some This kind of accumulated "dust" is dispersed in the chamber under the gas fluctuation caused by the process gas, and falls on the surface of the coating substrate under the action of gravity to cause falling dust. It is this kind of falling dust that causes a large number of coating waste products
In order to reduce this loss of waste products, many manufacturers have to perform frequent equipment maintenance, repeatedly pumping and breaking the vacuum, resulting in a decrease in production efficiency and unstable product quality.
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[0012] In order to clarify the technical scheme and technical purpose of the present invention, the present invention will be further introduced below in conjunction with the accompanying drawings and specific implementation methods.
[0013] As shown in the figure, a 12-mesh stainless steel mesh 2 is installed on the cathode shielding plate 1, and the stainless steel mesh 2 is made of 304 stainless steel. The stainless steel mesh 2 can be welded on the surface of the shielding plate 1 by means of electric welding, and it does not have to be tightly welded. The specific welding connection method can be determined according to actual needs and specific conditions.
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The invention discloses low-dust fall vacuum magneto-controlled sputter coating equipment, which is provided with a sputtering region, wherein a target and an assembly of a magneto-controlled sputtering cathode are arranged in the sputtering region. The low-dust fall vacuum magneto-controlled sputter coating equipment is characterized in that: a shield of the magneto-controlled sputtering cathode is provided with a stainless steel net. During coating of glass with a vacuum magneto-controlled sputter coating method, a cathode shield is provided with the stainless steel net, so that the contact area and adsorption force between ions not sputtered onto a substrate and the cathode shield are increased, the probability of the production of dust fall on coated glass is lowered effectively, the yield of coated products is increased greatly, and the maintenance frequency of the coating equipment is lowered.
Description
technical field [0001] The invention relates to a sputtering coating equipment, which is used in a glass coating process, in particular to a vacuum magnetron sputtering coating equipment with less falling dust. Background technique [0002] At present, the magnetron sputtering equipment used for large-area glass coating on the market adopts a horizontal production line. In this operation, a large number of ions that have not been sputtered to the substrate are adsorbed on the shielding plate or the cathode cover plate, and loose accumulation will be formed for a long time. Some The accumulated "dust" is dispersed in the cavity under the gas fluctuation caused by the process gas, and falls on the surface of the coating substrate under the action of gravity to form dust fall. It is this kind of dust fall that causes a large amount of coating waste. In order to reduce the loss of such waste products, many manufacturers have to perform frequent equipment maintenance, repeatedly ...
Claims
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IPC IPC(8): C23C14/35
Inventor 林嘉宏
Owner 林嘉宏