Film forming device with detachable gas inlet and outlet structure

A film-forming device and detachable technology, which is applied in the field of film-forming devices with a detachable air inlet and outlet structure, can solve the problems that the transparent conductive film coating process cannot be implemented, and achieve the effects of easy cleaning, convenient disassembly, and reduced production costs
CN102409317AInactive Publication Date: 2012-04-11ASIATREE TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
ASIATREE TECH
Publication Date
2012-04-11
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention discloses a film forming device with a detachable gas inlet and outlet structure. The detachable gas inlet and outlet structure mainly comprises a plate body, a venting unit and a film forming raw material supplying unit, wherein the venting unit is arranged on one end of the plate body, and the film forming raw material supplying unit is arranged on the other end of the plate body. Through combining with a created transmission device, the film-forming device disclosed by the invention can be used for manufacturing a continuous and uniform large-area film.
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Description

technical field

[0001] The invention relates to a film forming device, in particular to a film forming device with a detachable gas inlet and outlet structure. Background technique

[0002] The electrodes of various display elements such as liquid crystal display elements and electroluminescent elements or thin-film solar cells are mainly transparent conductive films with high visible light transmittance and low resistance. Therefore, the transparent conductive film has become an indispensable electrode material in the completion of various display elements today. For example, indium tin oxide (Indium Tin Oxide, ITO), tin oxide (Tin Oxide, TO), fluorine-doped tin oxide (Fluorine-doped Tin Oxide, FTO) or aluminum-doped zinc oxide (Aluminum-doped Zinc Oxide, AZO) and other conductive metal oxide as the main component of the film, which has both excellent transparency to visible light and excellent electrical conductivity. In the preparation of transparent conductive films, t...

Claims

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