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Film forming device with detachable gas inlet and outlet structure

A film-forming device and detachable technology, which is applied in the field of film-forming devices with a detachable air inlet and outlet structure, can solve the problems that the transparent conductive film coating process cannot be implemented, and achieve the effects of easy cleaning, convenient disassembly, and reduced production costs

Inactive Publication Date: 2012-04-11
ASIATREE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for manufacturers that do not have the float process, it is impossible to implement the coating process of the transparent conductive film

Method used

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  • Film forming device with detachable gas inlet and outlet structure
  • Film forming device with detachable gas inlet and outlet structure
  • Film forming device with detachable gas inlet and outlet structure

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Embodiment Construction

[0051] Please refer to figure 1 , is a schematic diagram of the first embodiment of the present invention, disclosing a film forming device 100 with a detachable gas inlet and outlet structure. The film forming device 100 includes a furnace body 110 , a conveying device 120 , a heater 130 , a detachable gas inlet and outlet structure 140 , a connecting element 150 and a connecting element 160 .

[0052] The film forming operation is performed in the film forming chamber 111 inside the furnace body 110 . The film forming chamber 111 has a substrate input port 112 and a substrate output port 113 , so that the substrate 101 to be film-formed is input through the substrate input port 112 and output through the substrate output port 113 . The furnace body 110 is equipped with heat insulating material to prevent the heat loss of the furnace body 110 . Insulation materials can be such as figure 2 The thermal insulation cotton 114 shown. For the substrate 101, glass, stainless st...

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Abstract

The invention discloses a film forming device with a detachable gas inlet and outlet structure. The detachable gas inlet and outlet structure mainly comprises a plate body, a venting unit and a film forming raw material supplying unit, wherein the venting unit is arranged on one end of the plate body, and the film forming raw material supplying unit is arranged on the other end of the plate body. Through combining with a created transmission device, the film-forming device disclosed by the invention can be used for manufacturing a continuous and uniform large-area film.

Description

technical field [0001] The invention relates to a film forming device, in particular to a film forming device with a detachable gas inlet and outlet structure. Background technique [0002] The electrodes of various display elements such as liquid crystal display elements and electroluminescent elements or thin-film solar cells are mainly transparent conductive films with high visible light transmittance and low resistance. Therefore, the transparent conductive film has become an indispensable electrode material in the completion of various display elements today. For example, indium tin oxide (Indium Tin Oxide, ITO), tin oxide (Tin Oxide, TO), fluorine-doped tin oxide (Fluorine-doped Tin Oxide, FTO) or aluminum-doped zinc oxide (Aluminum-doped Zinc Oxide, AZO) and other conductive metal oxide as the main component of the film, which has both excellent transparency to visible light and excellent electrical conductivity. In the preparation of transparent conductive films, t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455C23C16/54
Inventor 李炳寰洪丽玲江鸿儒胡英杰蔡明雄
Owner ASIATREE TECH
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