Dynamic balance method for magnetic suspension molecular pump

A molecular pump and magnetic levitation technology, applied in pump, pump control, axial flow pump, etc., can solve the problems of low efficiency and complicated steps, and achieve the effect of simplifying operation steps, reducing mechanical vibration and improving efficiency.
CN102425560AActive Publication Date: 2012-04-25KYKY TECH +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
KYKY TECH
Publication Date
2012-04-25

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Abstract

The invention discloses a dynamic balance method for a magnetic suspension molecular pump. After a motor of the magnetic suspension molecular pump is started, an unbalanced vibration control module is started; and if unbalanced mass of a rotor ensures that the maximum radial amplitude of the rotor is not greater than 1 / 2 a protection gap in a speed raising process under the control of the unbalanced vibration control module, the unbalanced vibration control module can inhibit the same frequency vibration of the rotor to ensure that the rotation speed of the rotor can exceed rigid critical rotation speed of the rotor quickly, so the rotor of the magnetic suspension molecular pump is subjected to dynamic balance in high speed. By the dynamic balance method, the rotor of the magnetic suspension molecular pump can be directly subjected to dynamic balance in high speed; and the steps are simple and the method is high in efficiency.
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Description

technical field

[0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for dynamic balancing of a magnetic levitation molecular pump. Background technique

[0002] Molecular pump is a kind of vacuum pump, which uses high-speed rotating rotor impeller to transfer momentum to gas molecules to obtain directional speed, so that the gas is compressed and driven to the exhaust port, and then pumped away by the backing pump . The magnetic levitation molecular pump is a molecular pump that uses magnetic bearings (also known as active magnetic levitation bearings) as the molecular pump rotor support. Contact has the advantages of no mechanical wear, low energy consumption, high allowable speed, low noise, long life, and no need for lubrication. At present, magnetic levitation molecular pumps are widely used in the fields of obtaining high vacuum and high cleanliness vacuum environments.

[0003] The internal structure of the mag...

Claims

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