Tunable and switchable multilayer optical devices
An optical device and optically active technology, applied in the field of multilayer optical devices, can solve the problems of inconvenient optical adjustment
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[0021] Recently, much work has been done to change semiconductor processing technology to manufacture micromechanical devices and devices with electronic and micromechanical components. Such micromechanical elements may include cavities between multiple layers of material. For example, a pressure sensor has been constructed by forming a film of material (such as carbon dioxide) over a sealed cavity on the surface of a silicon wafer. The deflection of the membrane is monitored as a measure of pressure. Similarly, Texas Instruments has sold projection display devices that operate by electrostatically deflecting aluminum micromechanical mirrors, which are formed on air-filled cavities formed on the surface of semiconductor wafers, but These display devices rely on the reflection of the mirror surface instead of interference effects, and their function does not depend on the refractive index of the fluid.
[0022] Normally, such a cavity between layers is formed by the following pr...
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