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Tunable and switchable multilayer optical devices

An optical device and optically active technology, applied in the field of multilayer optical devices, can solve the problems of inconvenient optical adjustment

Active Publication Date: 2014-08-13
OMNIVISION TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Optical adjustments by rotating the element are sometimes inconvenient

Method used

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  • Tunable and switchable multilayer optical devices
  • Tunable and switchable multilayer optical devices
  • Tunable and switchable multilayer optical devices

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Experimental program
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Effect test

Embodiment Construction

[0021] Recently, much work has been done to change semiconductor processing technology to manufacture micromechanical devices and devices with electronic and micromechanical components. Such micromechanical elements may include cavities between multiple layers of material. For example, a pressure sensor has been constructed by forming a film of material (such as carbon dioxide) over a sealed cavity on the surface of a silicon wafer. The deflection of the membrane is monitored as a measure of pressure. Similarly, Texas Instruments has sold projection display devices that operate by electrostatically deflecting aluminum micromechanical mirrors, which are formed on air-filled cavities formed on the surface of semiconductor wafers, but These display devices rely on the reflection of the mirror surface instead of interference effects, and their function does not depend on the refractive index of the fluid.

[0022] Normally, such a cavity between layers is formed by the following pr...

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Abstract

A multilayer optical device includes an arrangement formed on a substrate, the arrangement including at least a first layer, a second layer, and a space disposed between the first layer and the second layer. The second layer is a thin film. The arrangement formed by the first layer, the second layer, and the space between the first and second layers produces transmitted, reflected or scattered electromagnetic energy that is spectrally modified from electromagnetic energy incident on the arrangement. The optical function of optics depends at least in part on interference effects. The optical detector system includes similar multilayer optics. A space within the device is in fluid communication with the structure for receiving a first fluid such that the device operates in the first mode or the second mode based on the presence or absence of the fluid in the space. The system includes a photodetector for receiving the modified electromagnetic energy, and a controller in fluid communication with the space that schedules the presence or absence of fluid in the space.

Description

Technical field [0001] The present disclosure relates to the field of multilayer optical devices, such as interference filters, dichroic mirrors, diffraction gratings, and other devices that rely on interference. Background technique [0002] Multi-layer, thin, thickness-controllable interlayers of transparent or translucent materials can be used to form interference filters, dichroic mirrors, and other optical elements capable of interacting with electromagnetic radiation of specific wavelengths, where these layers have two Made of one or more materials with different refractive indices. For the sake of simplicity, such devices are referred to herein as multilayer optical elements and work through interference effects, which occur due to the presence of at least some reflections at each boundary between the layers of the sandwich. At a specific wavelength, the light reflected and transmitted from each of the boundaries can add or cancel. For example, if the round-trip distance...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/00H01L31/0216
CPCG02B26/001H01L31/02165G02B26/005
Inventor 高路保罗·E·X·希尔贝拉马克·梅洛尼
Owner OMNIVISION TECH INC