MOS (Metal Oxide Semiconductor) transistor and manufacturing method thereof

Abstract

The invention provides a manufacturing method of a MOS (Metal Oxide Semiconductor) transistor; the manufacturing method comprises the following steps of: providing a semiconductor substrate, and forming a grid structure on the semiconductor substrate; carrying out an oxidation technology to form an oxide layer covering the grid structure; carrying out ion implantation on the semiconductor substrate at the two sides of the grid structure to form source / drain extension regions, pocket implantation regions surrounding the source / drain extension regions and defect adsorption regions surrounding the pocket implantation regions; carrying out an annealing technology, and activating doping ions of the source / drain extension regions, the defect adsorption regions and the pocket implantation regions; forming side walls at the two sides of the grid structure; and by using the grid structure and the side walls as masking films, carrying out source / drain ion implantation, and forming the source / drain regions in the semiconductor substrate at the two sides of the grid structure. According to the manufacturing method, the problem that the doping ions of the pocket implantation regions and the source / drain extension regions diffuse along with defects is solved, the oxidation-enhanced diffusion effect is eliminated, the transient-enhanced diffusion effect is suppressed, and the leakage current of devices is reduced.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a MOS transistor and a manufacturing method thereof. Background technique [0002] Metal-oxide-semiconductor (MOS) transistors are the most basic devices in semiconductor manufacturing. They are widely used in various integrated circuits. According to the main carrier and the type of doping during manufacturing, they are divided into NMOS and PMOS transistors. [0003] The prior art provides a method for manufacturing a MOS transistor. Please refer to Figure 1 to Figure 3 , is a schematic cross-sectional structure diagram of a manufacturing method of a MOS transistor in the prior art. [0004] Please refer to figure 1 , providing a semiconductor substrate 100, forming isolation structures 101 in the semiconductor substrate 100, the semiconductor substrate 100 between the isolation structures 101 is an active region, and forming a doped well in the active region (not shown), the...

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Problems solved by technology

[0010] It has been found in practice that the MOS transistors produced by existing methods have a strong transient enhanced diffusion effect (Transistent Enhanced Diffusion, TED), which not only causes the short channel effect (Short Channel effect, SCE) of the transistor ) and reverse short channel effect (Reverse Short Channel Effect, RSCE), and affect the transistor channel mobility, junction capacitance and junction leakage current

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